ArticleMicrosystems & nanoengineering2024
Real-time correction of gain nonlinearity in electrostatic actuation for whole-angle micro-shell resonator gyroscope.
Article in Microsystems & nanoengineering, 2024. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 4 papers.
What it found
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Who cites it
4 citing papers in PubMed.
- Manufacturing of 8 million Q-factor micro hemispherical resonator gyroscopes via patterned coating technology.Microsystems & nanoengineering · 2026Article
- Localized thermal tuning in fused silica inductive vibrating ring gyroscopes.Microsystems & nanoengineering · 2026Article
- 0.003°/h bias instability of honeycomb disk resonator gyroscope achieved by mode reversal combined mode deflection control method.Microsystems & nanoengineering · 2025Article
- Identification and trimming of the unbalanced mass in micro hemispherical resonators based on an elastic electrode substrate.Microsystems & nanoengineering · 2025Article
Corrections and comments
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Authors and funding
8 authors.
Funding
Abstract
MEMS gyroscopes are well known for their outstanding advantages in Cost Size Weight and Power (CSWaP), which have inspired great research attention in recent years. A higher signal-to-noise ratio (SNR) for MEMS gyroscopes operating at larger vibrating amplitudes provides improved measuring resolution and ARW performance. However, the increment of amplitude causes strong nonlinear effects of MEMS gyroscopes due to their micron size, which has negative influences on the performance. This paper carries out detailed research on a general nonlinear mechanism on the sensors using parallel-plate capacitive transducers, which is called the gain nonlinearity in electrostatic actuation. The theoretical model established in this paper demonstrates the actuation gain nonlinearity causes the control-force coupling and brings extra angle-dependent bias with the 4
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Registered trials
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