ArticleNano letters2024
The Graphene Squeeze-Film Microphone.
Article in Nano letters, 2024. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 4 papers.
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Who cites it
4 citing papers in PubMed.
- Design and Optimization of High-G Graphene MEMS Acceleration Sensor.Micromachines · 2026Article
- Simulation and Analysis of a Silicon Membrane-Supported Beam-Island Diaphragm for Graphene Piezoresistive MEMS Microphones in High-SPL Acoustic Sensing.Micromachines · 2026Article
- Suspended graphene-based NEMS accelerometers with direct electrical readout.Microsystems & nanoengineering · 2025Article
- The Graphene Squeeze-Film Microphone.Nano letters · 2024Article
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Authors and funding
4 authors.
Funding
No grant is acknowledged in the PubMed record.
Abstract
Most microphones detect sound-pressure-induced motion of a membrane. In contrast, we introduce a microphone that operates by monitoring sound-pressure-induced modulation of the air compressibility. By driving a graphene membrane at resonance, the gas, that is trapped in a squeeze-film beneath it, is compressed at high frequency. Since the gas-film stiffness depends on the air pressure, the resonance frequency of the graphene is modulated by variations in sound pressure. We demonstrate that this squeeze-film microphone principle can be used to detect sound and music by tracking the membrane's resonance frequency using a phase-locked loop. The squeeze-film microphone potentially offers advantages like increased dynamic range, lower susceptibility to pressure-induced failure and vibration-induced noise over conventional devices. Moreover, microphones might become much smaller, as demonstrated in this work with one that operates using a circular graphene membrane with an area that is more than 1000 times smaller than that of MEMS microphones.
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