ArticleMicrosystems & nanoengineering2024
Rapid-response, low-detection-limit, positive-negative air pressure sensing: GaN chips integrated with hydrophobic PDMS films.
Article in Microsystems & nanoengineering, 2024. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 2 papers.
What it found
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The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.
The trial behind it
Trials whose registry record cites this paper, or whose number appears in the abstract. A trial that started after this paper was published is citing it as background, not reporting it.
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Who cites it
2 citing papers in PubMed.
- Closed-Loop Chemically Recyclable Separation Membranes With Superior Pervaporation Performance.Advanced materials (Deerfield Beach, Fla.) · 2026Article
- Dual-mode CMUT structure sensor for high hydrostatic pressure measurements: conventional and collapse modes.Microsystems & nanoengineering · 2025Article
Corrections and comments
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Authors and funding
5 authors.
Funding
Abstract
Despite the importance of positive and negative pressure sensing in numerous domains, the availability of a single sensing unit adept at handling this dual task remains highly limited. This study introduces a compact optical device capable of swiftly and precisely detecting positive and negative pressures ranging from -35 kPa to 35 kPa. The GaN chip, which serves as a core component of the device, is monolithically integrated with light-emitting and light-detecting elements. By combining a deformable PDMS film coated with a hydrophobic layer, the chip can respond to changes in optical reflectance induced by pressure fluctuations. The integrated sensing device has low detection limits of 4.3 Pa and -7.8 Pa and fast response times of 0.14 s and 0.22 s for positive and negative pressure variations, respectively. The device also demonstrates adaptability in capturing distinct human breathing patterns. The proposed device, characterized by its compactness, responsiveness, and ease of operation, holds promise for a variety of pressure-sensing applications.
Identifiers
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Registered trials
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