Evidence map›Paper›PMID 39472699›Full record

ArticleScientific reports2024

Optimization of polishing fluid composition for single crystal silicon carbide by ultrasonic assisted chemical-mechanical polishing.

Linzheng Ye, Jialong Wu, Xijing Zhu, Yao Liu, Wenlong Li, Shida Chuai, Zexiao Wang

Abstract read
PubMed Full text at PMC Publisher
In one paragraph

Article in Scientific reports, 2024. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 4 papers.

0numbers the graph read from it
0cells of the map it votes in
4citing papers in PubMed
–field-weighted citation impact
1 · What the graph read from it

What it found

Each row is one number read from the abstract, on the scale the paper reported it, with its interval. Left of the dashed line favours the treatment, right favours the comparator. Under each row is the sentence it came from. New to these charts? A ten-minute tutorial.

The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.

2 · The registry

The trial behind it

Trials whose registry record cites this paper, or whose number appears in the abstract. A trial that started after this paper was published is citing it as background, not reporting it.

Neither the registry nor the abstract names a trial number. If this is a trial report, that itself is worth knowing.

3 · Its place in the literature

Who cites it

4 citing papers in PubMed.

  1. Article
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4 · The record

Corrections and comments

PubMed lists nothing against this paper. Absence here is not a guarantee, only a check that was made.

5 · Who and what money

Authors and funding

7 authors.

Linzheng YeSchool of Mechanical Engineering, North University of China, Taiyuan, 030051, China. lz09020141@163.com.
Jialong WuSchool of Mechanical Engineering, North University of China, Taiyuan, 030051, China.
Xijing ZhuSchool of Mechanical Engineering, North University of China, Taiyuan, 030051, China.
Yao LiuSchool of Mechanical Engineering, North University of China, Taiyuan, 030051, China.
Wenlong LiSchool of Mechanical Engineering, North University of China, Taiyuan, 030051, China.
Shida ChuaiSchool of Mechanical Engineering, North University of China, Taiyuan, 030051, China.
Zexiao WangSchool of Mechanical Engineering, North University of China, Taiyuan, 030051, China.

Funding

National Natural Science Foundation of China 52375470the Central Guidance on Local Science and Technology Development Fund of Shanxi Province YDZJSX2022C005
6 · The paper itself

Abstract

Silicon carbide (SiC) is renowned for its exceptional hardness, thermal conductivity, chemical stability, and wear resistance. However, the existing process is difficult to meet the high standards of uniform corrosion in its polishing process and surface roughness and flatness after polishing, new polishing fluids and technique optimization are crucial for development. The study optimized and validated the composition of the polishing fluid used in ultrasonic-assisted chemical-mechanical polishing (UACMP). Abrasives significantly influenced the material removal rate (MRR) and surface roughness (Ra), contributing 67.63% and 56.43%, respectively. Organic bases and pH buffers significantly affected Ra, accounting for 19.66% and 21.44%, respectively. The optimum composition was determined, consisting of triethylamine (3wt%), potassium hydrogen phthalate (1wt%), a composite of silica and alumina abrasive particles (5wt%), and hydrogen peroxide (6wt%), which reduced the Ra from 95 nm to 3 nm. The MRR achieved 25.96 nm/min. In comparison to the 7 nm minimum roughness from the orthogonal test, the optimal scheme's Ra was reduced by 57.14%, leading to a significant enhancement in overall surface quality. In this paper, a new type of additive is added to prepare the polishing liquid, which provides a new idea for the UACMP of SiC and has a great impact.

Indexed as

Material removal rateOrthogonal testPolishing fluidSurface roughnessUltrasonic polishing

Identifiers

PMID39472699
PMCPMC11522676

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Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.