ReviewMicrosystems & nanoengineering2024
Graphene MEMS and NEMS.
Review in Microsystems & nanoengineering, 2024. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 15 papers.
What it found
Each row is one number read from the abstract, on the scale the paper reported it, with its interval. Left of the dashed line favours the treatment, right favours the comparator. Under each row is the sentence it came from. New to these charts? A ten-minute tutorial.
The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.
The trial behind it
Trials whose registry record cites this paper, or whose number appears in the abstract. A trial that started after this paper was published is citing it as background, not reporting it.
Neither the registry nor the abstract names a trial number. If this is a trial report, that itself is worth knowing.
Who cites it
15 citing papers in PubMed.
- MXene/graphene composite flexible impedance glove with wide linear range for cross-subject gesture recognition.Microsystems & nanoengineering · 2026Article
- Synchronous In Situ Harmonic Calibration of Vibration Amplitude and Gap in 2D Nanomechanical Resonators.Nanomaterials (Basel, Switzerland) · 2026Article
- Transient Electroosmotic Flow of Maxwell Fluids Through Soft Channels with High Surface Potentials.Polymers · 2026Article
- A smartphone-powered decentralized microfluidic platform for sensitive CRISPR-based nucleic acid detection.Microsystems & nanoengineering · 2026Article
- Puckering vs. Localisation: Contrasting Nanoscale Lithography and Wear Mechanisms in MoSMaterials (Basel, Switzerland) · 2026Article
- Borophene: Crucial Challenges and the Way Forward.Advanced science (Weinheim, Baden-Wurttemberg, Germany) · 2026Review
- Shear properties and stable wrinkle resistance in 2D TiNature communications · 2026Article
- Rapid, One-Step Synthesis of Laser-Scribed Graphene Sensor for Self-Activated Chemiresistive NOACS omega · 2026Article
- Navigating the Ethereal Tightrope: The Nanogenerator Manipulates Neurons for Immune Equilibrium.Advanced science (Weinheim, Baden-Wurttemberg, Germany) · 2026Review
- Tunable multi-band terahertz sensor based on graphene plasmonic metasurfaces.Scientific reports · 2026Article
- Sensilla Trichoidea-Inspired, High-Temperature, and Omnidirectional Vibration Perception Based on Monolayer Graphene.Nano-micro letters · 2026Article
- Photogating Regimes in Graphene: Memory-Bearing and Reset-Free Operation.Nanomaterials (Basel, Switzerland) · 2025Article
- Prospects and Trends in Biomedical Microelectromechanical Systems (MEMS) Devices: A Review.Biomolecules · 2025Review
- Silicon-based MEMS/NEMS empowered by graphene: a scheme for large tunability and functionality.Microsystems & nanoengineering · 2025Article
- Suspended graphene-based NEMS accelerometers with direct electrical readout.Microsystems & nanoengineering · 2025Article
Corrections and comments
PubMed lists nothing against this paper. Absence here is not a guarantee, only a check that was made.
Authors and funding
7 authors.
Funding
Abstract
Graphene is being increasingly used as an interesting transducer membrane in micro- and nanoelectromechanical systems (MEMS and NEMS, respectively) due to its atomical thickness, extremely high carrier mobility, high mechanical strength, and piezoresistive electromechanical transductions. NEMS devices based on graphene feature increased sensitivity, reduced size, and new functionalities. In this review, we discuss the merits of graphene as a functional material for MEMS and NEMS, the related properties of graphene, the transduction mechanisms of graphene MEMS and NEMS, typical transfer methods for integrating graphene with MEMS substrates, methods for fabricating suspended graphene, and graphene patterning and electrical contact. Consequently, we provide an overview of devices based on suspended and nonsuspended graphene structures. Finally, we discuss the potential and challenges of applications of graphene in MEMS and NEMS. Owing to its unique features, graphene is a promising material for emerging MEMS, NEMS, and sensor applications.
Identifiers
What OpenQuestion holds
Registered trials
Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.