ArticleMicromachines2024
Variation of MEMS Thin Film Device Parameters under the Influence of Thermal Stresses.
Xiao Wen et al.PubMed ↗Full text ↗Publisher ↗
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ArticleMicromachines2024
Xiao Wen et al.PubMed ↗Full text ↗Publisher ↗
No numbers read from the abstract.