Evidence map›Paper›PMID 39455552›Full record

ArticleNature communications2024

Ultra-high precision nano additive manufacturing of metal oxide semiconductors via multi-photon lithography.

Chun Cao, Xianmeng Xia, Xiaoming Shen, Xiaobing Wang, Zhenyao Yang, Qiulan Liu, Chenliang Ding, Dazhao Zhu, Cuifang Kuang, Xu Liu

Abstract read
In one paragraph

Article in Nature communications, 2024. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 10 papers.

0numbers the graph read from it
0cells of the map it votes in
10citing papers in PubMed
–field-weighted citation impact
1 · What the graph read from it

What it found

Each row is one number read from the abstract, on the scale the paper reported it, with its interval. Left of the dashed line favours the treatment, right favours the comparator. Under each row is the sentence it came from. New to these charts? A ten-minute tutorial.

The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.

2 · The registry

The trial behind it

Trials whose registry record cites this paper, or whose number appears in the abstract. A trial that started after this paper was published is citing it as background, not reporting it.

Neither the registry nor the abstract names a trial number. If this is a trial report, that itself is worth knowing.

3 · Its place in the literature

Who cites it

10 citing papers in PubMed.

  1. Article
  2. Article
  3. Article
  4. Review
  5. Article
  6. Electron-Induced C─F Bond Activation in SnAngewandte Chemie (International ed. in English) · 2026
    Article
  7. Article
  8. Article
  9. Review
  10. Review
4 · The record

Corrections and comments

PubMed lists nothing against this paper. Absence here is not a guarantee, only a check that was made.

5 · Who and what money

Authors and funding

10 authors.

Chun Cao *School of Mechanical Engineering, Hangzhou Dianzi University, Hangzhou, 310018, China.ORCID http://orcid.org/0000-0002-7332-073X
Xianmeng Xia *Research Center for Astronomical Computing, Zhejiang Lab, Hangzhou, 311121, China.
Xiaoming Shen *ZJU-Hangzhou Global Scientific and Technological Innovation Center, Hangzhou, 311200, China.
Xiaobing WangResearch Center for Astronomical Computing, Zhejiang Lab, Hangzhou, 311121, China.
Zhenyao YangResearch Center for Astronomical Computing, Zhejiang Lab, Hangzhou, 311121, China.
Qiulan LiuState Key Laboratory of Extreme Photonics and Instrumentation, College of Optical Science and Engineering, Zhejiang University, Hangzhou, 310027, China. 21430066@zju.edu.cn.
Chenliang DingState Key Laboratory of Extreme Photonics and Instrumentation, College of Optical Science and Engineering, Zhejiang University, Hangzhou, 310027, China.
Dazhao ZhuState Key Laboratory of Extreme Photonics and Instrumentation, College of Optical Science and Engineering, Zhejiang University, Hangzhou, 310027, China.
Cuifang KuangZJU-Hangzhou Global Scientific and Technological Innovation Center, Hangzhou, 311200, China. cfkuang@zju.edu.cn.ORCID http://orcid.org/0000-0002-7650-0349
Xu LiuZJU-Hangzhou Global Scientific and Technological Innovation Center, Hangzhou, 311200, China.ORCID http://orcid.org/0000-0003-3982-3197

Funding

National Natural Science Foundation of China (National Science Foundation of China) 22105180
6 · The paper itself

Abstract

As a basic component of the versatile semiconductor devices, metal oxides play a critical role in modern electronic information industry. However, ultra-high precision nanopatterning of metal oxides often involves multi-step lithography and transfer process, which is time-consuming and costly. Here, we report a strategy, using metal-organic compounds as solid precursor photoresist for multi-photon lithography and post-sintering, to realize ultra-high precision additive manufacturing of metal oxides. As a result, we gain metal oxides including ZnO, CuO and ZrO

Identifiers

PMID39455552
PMCPMC11511962

What OpenQuestion holds

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LicenceCC BY
Read underepoch 390

Registered trials

None linked

Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.