ArticleNanomaterials (Basel, Switzerland)2024
Influence of Synthesis Parameters on Structure and Characteristics of the Graphene Grown Using PECVD on Sapphire Substrate.
Article in Nanomaterials (Basel, Switzerland), 2024. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 2 papers.
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Who cites it
2 citing papers in PubMed.
- Plasma-Enhanced Graphene Coatings on Ti-6Al-4V: Insights from Non-Destructive Characterization.Materials (Basel, Switzerland) · 2026Article
- DFT-Assisted Approach to Low-Temperature Graphene Growth on Sapphire.Small (Weinheim an der Bergstrasse, Germany) · 2025Article
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4 authors.
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Abstract
The high surface area and transfer-less growth of graphene on dielectric materials is still a challenge in the production of novel sensing devices. We demonstrate a novel approach to graphene synthesis on a C-plane sapphire substrate, involving the microwave plasma-enhanced chemical vapor deposition (MW-PECVD) technique. The decomposition of methane, which is used as a precursor gas, is achieved without the need for remote plasma. Raman spectroscopy, atomic force microscopy and resistance characteristic measurements were performed to investigate the potential of graphene for use in sensing applications. We show that the thickness and quality of graphene film greatly depend on the CH
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