Evidence map›Paper›PMID 39408449›Full record

ArticlePolymers2024

Preparations of Polyurethane Foam Composite (PUFC) Pads Containing Micro-/Nano-Crystalline Cellulose (MCC/NCC) toward the Chemical Mechanical Polishing Process.

Yi-Shen Huang, Yu-Wen Huang, Qiao-Wen Luo, Chao-Hsing Lin, Penjit Srinophakun, Supanicha Alapol, Kun-Yi Andrew Lin, Chih-Feng Huang

Abstract read
PubMed Full text at PMC Publisher
In one paragraph

Article in Polymers, 2024. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Not yet cited in PubMed.

0numbers the graph read from it
0cells of the map it votes in
0citing papers in PubMed
–field-weighted citation impact
1 · What the graph read from it

What it found

Each row is one number read from the abstract, on the scale the paper reported it, with its interval. Left of the dashed line favours the treatment, right favours the comparator. Under each row is the sentence it came from. New to these charts? A ten-minute tutorial.

The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.

2 · The registry

The trial behind it

Trials whose registry record cites this paper, or whose number appears in the abstract. A trial that started after this paper was published is citing it as background, not reporting it.

Neither the registry nor the abstract names a trial number. If this is a trial report, that itself is worth knowing.

3 · Its place in the literature

Who cites it

0 citing papers in PubMed.

No citing paper in PubMed yet.

4 · The record

Corrections and comments

PubMed lists nothing against this paper. Absence here is not a guarantee, only a check that was made.

5 · Who and what money

Authors and funding

8 authors.

Yi-Shen HuangDepartment of Chemical Engineering, i-Center for Advanced Science and Technology (iCAST), National Chung Hsing University, Taichung 40227, Taiwan.
Yu-Wen HuangSemiconductor and Green Technology Program, Academy of Circular Economy, National Chung Hsing University, Nantou City 540216, Taiwan.
Qiao-Wen LuoDepartment of Chemical Engineering, i-Center for Advanced Science and Technology (iCAST), National Chung Hsing University, Taichung 40227, Taiwan.
Chao-Hsing LinIV Technologies Co., Ltd., Taichung 40755, Taiwan.
Penjit SrinophakunDepartment of Chemical Engineering, Faculty of Engineering, Kasetsart University, Bangkok 10900, Thailand.
Supanicha AlapolDepartment of Chemical Engineering, Faculty of Engineering, Kasetsart University, Bangkok 10900, Thailand.
Kun-Yi Andrew LinDepartment of Environmental Engineering, Innovation and Development Center of Sustainable Agriculture & Research Center of Sustainable Energy and Nanotechnology, iCAST, National Chung Hsing University, Taichung 40227, Taiwan.
Chih-Feng HuangDepartment of Chemical Engineering, i-Center for Advanced Science and Technology (iCAST), National Chung Hsing University, Taichung 40227, Taiwan.ORCID 0000-0002-8062-8708

Funding

National Science and Technology Council, Taiwan NSTC113-2923-E-005-001-MY3
6 · The paper itself

Abstract

Polyurethane foam (PUF) pads are widely used in semiconductor manufacturing, particularly for chemical mechanical polishing (CMP). This study prepares PUF composites with microcrystalline cellulose (MCC) and nanocrystalline cellulose (NCC) to improve CMP performance. MCC and NCC were characterized using scanning electron microscopy (SEM) and X-ray diffraction (XRD), showing average diameters of 129.7 ± 30.9 nm for MCC and 22.2 ± 6.7 nm for NCC, both with high crystallinity (ca. 89%). Prior to preparing composites, the study on the influence of the postbaked step on the PUF was monitored through Fourier-transform infrared spectroscopy (FTIR). After that, PUF was incorporated with MCC/NCC to afford two catalogs of polyurethane foam composites (i.e., PUFC-M and PUFC-N). These PUFCs were examined for their thermal and surface properties using a differential scanning calorimeter (DSC), thermogravimetric analysis (TGA), dynamic mechanical analyzer (DMA), and water contact angle (WCA) measurements.

Indexed as

microcrystalline cellulosenanocrystalline cellulosepolishing padspolyurethane foam

Identifiers

PMID39408449
PMCPMC11479108

What OpenQuestion holds

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LicenceCC BY
Read underepoch 390

Registered trials

None linked

Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.