ArticleNanomaterials (Basel, Switzerland)2024
Large-Scale High-Accuracy and High-Efficiency Phase Plate Machining.
Guanhua Wang, Zhaoxiang Liu, Lvbin Song, Jianglin Guan, Wei Chen, Jian Liu, Jinming Chen, Min Wang, Ya Cheng
Abstract read
In one paragraphArticle in Nanomaterials (Basel, Switzerland), 2024. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Not yet cited in PubMed.
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2 · The registryThe trial behind it
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4 · The recordCorrections and comments
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5 · Who and what moneyAuthors and funding
9 authors.
Guanhua WangState Key Laboratory of Precision Spectroscopy, East China Normal University, Shanghai 200062, China.
Zhaoxiang LiuThe Extreme Optoelectromechanics Laboratory (XXL), School of Physics and Electronic Science, East China Normal University, Shanghai 200241, China.
Lvbin SongState Key Laboratory of Precision Spectroscopy, East China Normal University, Shanghai 200062, China.
Jianglin GuanState Key Laboratory of Precision Spectroscopy, East China Normal University, Shanghai 200062, China.
Wei ChenThe Extreme Optoelectromechanics Laboratory (XXL), School of Physics and Electronic Science, East China Normal University, Shanghai 200241, China.
Jian LiuState Key Laboratory of Precision Spectroscopy, East China Normal University, Shanghai 200062, China.
Jinming ChenThe Extreme Optoelectromechanics Laboratory (XXL), School of Physics and Electronic Science, East China Normal University, Shanghai 200241, China.
Min WangThe Extreme Optoelectromechanics Laboratory (XXL), School of Physics and Electronic Science, East China Normal University, Shanghai 200241, China.ORCID 0000-0002-2410-9495 Ya ChengState Key Laboratory of Precision Spectroscopy, East China Normal University, Shanghai 200062, China.ORCID 0000-0001-8269-5907 Funding
Fundamental Research Funds for the Central Universities, the National Natural Science Founda-tion of China 12204176, 12104159, 12334014, 12192251, 12174113, 12174107, 11933005, 12134001, 12274130, 12274133National Key R&D Program of China 2019YFA0705000the Engineering Research Center for Nanophotonics & Advanced Instrument, Ministry of Educa-tion, East China Normal University 2023nmc005the Innovation Program for Quantum Science and Technology 2021ZD0301403the Science and Technology Commission of Shanghai Municipality 21DZ1101500the Shanghai Municipal Science and Technology Major Project 2019SHZDZX01
6 · The paper itselfAbstract
In this paper, multifunctional, multilevel phase plates of quartz substrate were efficiently prepared by using a newly developed polygon scanner-based femtosecond laser photolithography system combined with inductively coupled discharge plasma reactive-ion etching (ICP-RIE) technology. The femtosecond laser photolithography system can achieve a scanning speed of 5 m/s and a preparation efficiency of 15 cm
Indexed as
diffractive optical elementsfemtosecond laser micromachiningFresnel phase platephotolithography
Identifiers
PMID39404290
PMCPMC11478046
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