Evidence map›Paper›PMID 39327431›Full record

ArticleMicrosystems & nanoengineering2024

Pt thin-film resistance thermo detectors with stable interfaces for potential integration in SiC high-temperature pressure sensors.

Ziyan Fang, Xiaoyu Wu, Hu Zhao, Xudong Fang, Chen Wu, Dong Zhang, Zhongkai Zhang, Bian Tian, Libo Zhao, Tiefu Li and 3 more

Abstract read
PubMed Full text at PMC Publisher
In one paragraph

Article in Microsystems & nanoengineering, 2024. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 2 papers.

0numbers the graph read from it
0cells of the map it votes in
2citing papers in PubMed
–field-weighted citation impact
1 · What the graph read from it

What it found

Each row is one number read from the abstract, on the scale the paper reported it, with its interval. Left of the dashed line favours the treatment, right favours the comparator. Under each row is the sentence it came from. New to these charts? A ten-minute tutorial.

The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.

2 · The registry

The trial behind it

Trials whose registry record cites this paper, or whose number appears in the abstract. A trial that started after this paper was published is citing it as background, not reporting it.

Neither the registry nor the abstract names a trial number. If this is a trial report, that itself is worth knowing.

3 · Its place in the literature

Who cites it

2 citing papers in PubMed.

  1. Review
  2. Article
4 · The record

Corrections and comments

PubMed lists nothing against this paper. Absence here is not a guarantee, only a check that was made.

5 · Who and what money

Authors and funding

13 authors.

Ziyan FangState Key Laboratory for Manufacturing Systems Engineering, International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies, Xi'an Jiaotong University, Xi'an, 710049, China.
Xiaoyu WuSchool of Mechanical Engineering, Xi'an Jiaotong University, Xi'an, 710049, China. XYmems@stu.xjtu.edu.cn.
Hu ZhaoSchool of Mechanical Engineering, Xi'an Jiaotong University, Xi'an, 710049, China. zhaoh087@avic.com.
Xudong FangState Key Laboratory for Manufacturing Systems Engineering, International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies, Xi'an Jiaotong University, Xi'an, 710049, China. dongfangshuo30@xjtu.edu.cn.ORCID http://orcid.org/0000-0002-0956-3833
Chen WuState Key Laboratory for Manufacturing Systems Engineering, International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies, Xi'an Jiaotong University, Xi'an, 710049, China.
Dong ZhangState Key Laboratory for Manufacturing Systems Engineering, International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies, Xi'an Jiaotong University, Xi'an, 710049, China.
Zhongkai ZhangState Key Laboratory for Manufacturing Systems Engineering, International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies, Xi'an Jiaotong University, Xi'an, 710049, China.
Bian TianState Key Laboratory for Manufacturing Systems Engineering, International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies, Xi'an Jiaotong University, Xi'an, 710049, China.
Libo ZhaoState Key Laboratory for Manufacturing Systems Engineering, International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies, Xi'an Jiaotong University, Xi'an, 710049, China.ORCID http://orcid.org/0000-0001-6101-8173
Tiefu LiSchool of Integrated Circuits, Tsinghua University, Beijing, 100084, China.ORCID http://orcid.org/0009-0007-5851-6519
Prateek VermaDepartment of Chemical Engineering, University of Arkansas, Fayetteville, AR, 72701, USA.ORCID http://orcid.org/0000-0002-2208-6496
Ryutaro MaedaState Key Laboratory for Manufacturing Systems Engineering, International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies, Xi'an Jiaotong University, Xi'an, 710049, China.
Zhuangde JiangState Key Laboratory for Manufacturing Systems Engineering, International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies, Xi'an Jiaotong University, Xi'an, 710049, China.

Funding

National Natural Science Foundation of China (National Science Foundation of China) 52175517
6 · The paper itself

Abstract

Due to the excellent mechanical, chemical, and electrical properties of third-generation semiconductor silicon carbide (SiC), pressure sensors utilizing this material might be able to operate in extreme environments with temperatures exceeding 300 °C. However, the significant output drift at elevated temperatures challenges the precision and stability of measurements. Real-time in situ temperature monitoring of the pressure sensor chip is highly important for the accurate compensation of the pressure sensor. In this study, we fabricate platinum (Pt) thin-film resistance temperature detectors (RTDs) on a SiC substrate by incorporating aluminum oxide (Al

Identifiers

PMID39327431
PMCPMC11427678

What OpenQuestion holds

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Registered trials

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Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.