Design of MEMS Pressure Sensor Anti-Interference System Based on Filtering and PID Compensation.

Due to the inherent temperature drift and lack of static stability in traditional pressure sensors, which make it difficult for them to meet the increasing demands of various industries, this paper designs a new system. The proposed system integrates temperature measurement and regulation circuits, signal processing, and communication circuits to accurately acquire and transmit pressure sensor data. The system designs a filtering algorithm to filter the original data and develops a data-fitting operation to achieve error compensation of the static characteristics. In order to eliminate the temperature drift problem of the sensor system, the system also adopts an improved PID thermostatic control algorithm to compensate for the temperature drift. Finally, it can also transmit the processed pressure data remotely. The experimental results show that the nonlinear error at 50 °C is reduced from the initial 1.82% to 0.24%; the hysteresis error is significantly reduced from 1.23% to 0.046%; and the repeatability error control is reduced from 3.79% to 0.89%. By compensating for thermal drift, the system's thermal sensitivity drift coefficient is reduced by 74.67%, the thermal zero drift coefficient is reduced by 66.24%, and the wireless communication range is up to 1km. The above significant optimization results fully validate the high accuracy and stability of the system, which is perfectly suited for demanding pressure measurement applications.