Open-Path Cavity Ring-Down Spectroscopy for Simultaneous Detection of Hydrogen Chloride and Particles in Cleanroom Environment.

Muhammad Bilal Khan, Christian L'Orange, Cheongha Lim, Deokhyeon Kwon, Azer P Yalin

Abstract read

In one paragraph

Article in Sensors (Basel, Switzerland), 2024. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Not yet cited in PubMed.

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0citing papers in PubMed

–field-weighted citation impact

1 · What the graph read from it

What it found

Each row is one number read from the abstract, on the scale the paper reported it, with its interval. Left of the dashed line favours the treatment, right favours the comparator. Under each row is the sentence it came from. New to these charts? A ten-minute tutorial.

The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.

2 · The registry

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Neither the registry nor the abstract names a trial number. If this is a trial report, that itself is worth knowing.

3 · Its place in the literature

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0 citing papers in PubMed.

No citing paper in PubMed yet.

4 · The record

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5 · Who and what money

Authors and funding

5 authors.

Muhammad Bilal KhanDepartment of Mechanical Engineering, Colorado State University, Fort Collins, CO 80525, USA.

Christian L'OrangeDepartment of Mechanical Engineering, Colorado State University, Fort Collins, CO 80525, USA.ORCID 0000-0003-1905-8694

Cheongha LimPyeongtaek Infra Analysis Group, Infra Analysis Team, Samsung Electronics, Pyeongtaek-si 17786, Republic of Korea.

Deokhyeon KwonPyeongtaek Infra Analysis Group, Infra Analysis Team, Samsung Electronics, Pyeongtaek-si 17786, Republic of Korea.

Azer P YalinDepartment of Mechanical Engineering, Colorado State University, Fort Collins, CO 80525, USA.ORCID 0000-0003-1347-7310

Funding

Samsung Electronics Corporation NA

6 · The paper itself

Abstract

The present study addresses advanced monitoring techniques for particles and airborne molecular contaminants (AMCs) in cleanroom environments, which are crucial for ensuring the integrity of semiconductor manufacturing processes. We focus on quantifying particle levels and a representative AMC, hydrogen chloride (HCl), having known detrimental effects on equipment longevity, product yield, and human health. We have developed a compact laser sensor based on open-path cavity ring-down spectroscopy (CRDS) using a 1742 nm near-infrared diode laser source. The sensor enables the high-sensitivity detection of HCl through absorption by the 2-0 vibrational band with an Allan deviation of 0.15 parts per billion (ppb) over 15 min. For quantifying particle number concentrations, we examine various detection methods based on statistical analyses of Mie scattering-induced ring-down time fluctuations. We find that the ring-down distributions' 3rd and 4th standard moments allow particle detection at densities as low as ~10

Indexed as

airborne molecular contaminantAMCcavity ring-down spectroscopycleanroomcontaminationCRDSHClhydrogen chlorideopen pathparticles

Identifiers

PMID39275525

DOI10.3390/s24175611

PMCPMC11398013

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LicenceCC BY

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Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.