Edge treatment for spurious mode suppression in thin-film lithium niobate resonators.

Arjun Aryal, Sidhant Tiwari, Darren W Branch, Aleem Siddiqui, Tito Busani

Abstract read

In one paragraph

Article in Scientific reports, 2024. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 1 paper.

0numbers the graph read from it

0cells of the map it votes in

1citing papers in PubMed

–field-weighted citation impact

1 · What the graph read from it

What it found

Each row is one number read from the abstract, on the scale the paper reported it, with its interval. Left of the dashed line favours the treatment, right favours the comparator. Under each row is the sentence it came from. New to these charts? A ten-minute tutorial.

The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.

2 · The registry

The trial behind it

Trials whose registry record cites this paper, or whose number appears in the abstract. A trial that started after this paper was published is citing it as background, not reporting it.

Neither the registry nor the abstract names a trial number. If this is a trial report, that itself is worth knowing.

3 · Its place in the literature

Who cites it

1 citing paper in PubMed.

Spurious-Mode Suppression in ScMicromachines · 2026
Article

4 · The record

Corrections and comments

PubMed lists nothing against this paper. Absence here is not a guarantee, only a check that was made.

5 · Who and what money

Authors and funding

5 authors.

Arjun Aryal *Center for High Technology Materials (CHTM), University of New Mexico (UNM), MSC01 04-2710, 1313 Goddard SE, Albuquerque, NM, 87106-4343, USA.

Sidhant Tiwari *Sandia National Laboratories (SNL), 1515 Eubank SE, Albuquerque, NM, 87123, USA.

Darren W BranchSandia National Laboratories (SNL), 1515 Eubank SE, Albuquerque, NM, 87123, USA.

Aleem SiddiquiSandia National Laboratories (SNL), 1515 Eubank SE, Albuquerque, NM, 87123, USA. asiddiq@sandia.gov.

Tito BusaniCenter for High Technology Materials (CHTM), University of New Mexico (UNM), MSC01 04-2710, 1313 Goddard SE, Albuquerque, NM, 87106-4343, USA. busanit@unm.edu.

Funding

No grant is acknowledged in the PubMed record.

6 · The paper itself

Abstract

Thin-film lithium niobate is an attractive material for RF acoustic devices because of its high electromechanical coupling. However, due to the large coupling and the high anisotropy, thin-film lithium niobate resonators are prone to accidental resonances called spurious modes. These modes compromise the frequency response of the resonators, limiting their use in filter and oscillator applications. In this work, we present a novel method of spurious mode suppression through a special edge treatment etch process. Two thin-film lithium niobate resonators were fabricated, one with smooth sidewalls and one with the edge treatment. It was found that the edge-treated resonators show a weaker spurious mode response. This is potentially a new way to mitigate spurious resonances, a major issue in lithium niobate Lamb wave devices.

Indexed as

Edge treatmentElectromechanical couplingEtch processLamb wave devicesRF acoustic devicesSpurious modes suppression

Identifiers

PMID39256420

DOI10.1038/s41598-024-71036-8

PMCPMC11387820

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Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.