Evidence map›Paper›PMID 39244663›Full record

ArticleACS nano2024

High-Yield Large-Scale Suspended Graphene Membranes over Closed Cavities for Sensor Applications.

Sebastian Lukas, Ardeshir Esteki, Nico Rademacher, Vikas Jangra, Michael Gross, Zhenxing Wang, Ha-Duong Ngo, Manuel Bäuscher, Piotr Mackowiak, Katrin Höppner and 3 more

Abstract read
In one paragraph

Article in ACS nano, 2024. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 6 papers.

0numbers the graph read from it
0cells of the map it votes in
6citing papers in PubMed
–field-weighted citation impact
1 · What the graph read from it

What it found

Each row is one number read from the abstract, on the scale the paper reported it, with its interval. Left of the dashed line favours the treatment, right favours the comparator. Under each row is the sentence it came from. New to these charts? A ten-minute tutorial.

The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.

2 · The registry

The trial behind it

Trials whose registry record cites this paper, or whose number appears in the abstract. A trial that started after this paper was published is citing it as background, not reporting it.

Neither the registry nor the abstract names a trial number. If this is a trial report, that itself is worth knowing.

3 · Its place in the literature

Who cites it

6 citing papers in PubMed.

  1. Article
  2. Article
  3. Review
  4. Review
  5. Article
  6. Article
4 · The record

Corrections and comments

PubMed lists nothing against this paper. Absence here is not a guarantee, only a check that was made.

5 · Who and what money

Authors and funding

13 authors.

Sebastian LukasChair of Electronic Devices, RWTH Aachen University, Otto-Blumenthal-Str. 25, 52074 Aachen, Germany.ORCID 0000-0002-8062-2832
Ardeshir EstekiChair of Electronic Devices, RWTH Aachen University, Otto-Blumenthal-Str. 25, 52074 Aachen, Germany.
Nico RademacherAMO GmbH, Advanced Microelectronic Center Aachen, Otto-Blumenthal-Str. 25, 52074 Aachen, Germany.
Vikas JangraChair of Electronic Devices, RWTH Aachen University, Otto-Blumenthal-Str. 25, 52074 Aachen, Germany.
Michael GrossChair of Electronic Devices, RWTH Aachen University, Otto-Blumenthal-Str. 25, 52074 Aachen, Germany.ORCID 0009-0001-9072-8200
Zhenxing WangAMO GmbH, Advanced Microelectronic Center Aachen, Otto-Blumenthal-Str. 25, 52074 Aachen, Germany.ORCID 0000-0002-2103-7692
Ha-Duong NgoUniversity of Applied Sciences Berlin, Wilhelminenhofstr. 75A (C 525), 12459 Berlin, Germany.ORCID 0000-0002-0294-537X
Manuel BäuscherFraunhofer IZM, Gustav-Meyer-Allee 25, 13355 Berlin, Germany.
Piotr MackowiakFraunhofer IZM, Gustav-Meyer-Allee 25, 13355 Berlin, Germany.ORCID 0000-0002-4891-3074
Katrin HöppnerFraunhofer IZM, Gustav-Meyer-Allee 25, 13355 Berlin, Germany.
Dominique J WehenkelApplied Nanolayers B.V., Feldmannweg 17, 2628 CT Delft, The Netherlands.
Richard van RijnApplied Nanolayers B.V., Feldmannweg 17, 2628 CT Delft, The Netherlands.
Max C LemmeChair of Electronic Devices, RWTH Aachen University, Otto-Blumenthal-Str. 25, 52074 Aachen, Germany.ORCID 0000-0003-4552-2411

Funding

No grant is acknowledged in the PubMed record.

6 · The paper itself

Abstract

Suspended membranes of monatomic graphene exhibit great potential for applications in electronic and nanoelectromechanical devices. In this work, a "hot and dry" transfer process is demonstrated to address the fabrication and patterning challenges of large-area graphene membranes on top of closed, sealed cavities. Here, "hot" refers to the use of high temperature during transfer, promoting the adhesion. Additionally, "dry" refers to the absence of liquids when graphene and target substrate are brought into contact. The method leads to higher yields of intact suspended monolayer chemical vapor deposition (CVD) graphene and artificially stacked double-layer CVD graphene membranes than previously reported. The yield evaluation is performed using neural-network-based object detection in scanning electron microscopy (SEM) images, ascertaining high yields of intact membranes with large statistical accuracy. The suspended membranes are examined by Raman tomography and atomic force microscopy (AFM). The method is verified by applying the suspended graphene devices as piezoresistive pressure sensors. Our technology advances the application of suspended graphene membranes and can be extended to other two-dimensional materials.

Indexed as

2D materialsgraphenemembraneMEMSpressure sensor

Identifiers

PMID39244663
PMCPMC11411726

What OpenQuestion holds

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Registered trials

None linked

Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.