Evidence map›Paper›PMID 39231931›Full record

ArticleLight, science & applications2024

Ultra-low loss silicon nitride becomes even cooler.

Dawn T H Tan, Xavier X Chia

Abstract read
In one paragraph

Article in Light, science & applications, 2024. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Not yet cited in PubMed.

0numbers the graph read from it
0cells of the map it votes in
0citing papers in PubMed
–field-weighted citation impact
1 · What the graph read from it

What it found

Each row is one number read from the abstract, on the scale the paper reported it, with its interval. Left of the dashed line favours the treatment, right favours the comparator. Under each row is the sentence it came from. New to these charts? A ten-minute tutorial.

The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.

2 · The registry

The trial behind it

Trials whose registry record cites this paper, or whose number appears in the abstract. A trial that started after this paper was published is citing it as background, not reporting it.

Neither the registry nor the abstract names a trial number. If this is a trial report, that itself is worth knowing.

3 · Its place in the literature

Who cites it

0 citing papers in PubMed.

No citing paper in PubMed yet.

4 · The record

Corrections and comments

PubMed lists nothing against this paper. Absence here is not a guarantee, only a check that was made.

5 · Who and what money

Authors and funding

2 authors.

Dawn T H TanPhotonics Devices and Systems Group, Singapore University of Technology and Design, Singapore, Singapore. dawn_tan@sutd.edu.sg.ORCID http://orcid.org/0000-0002-7111-1125
Xavier X ChiaPhotonics Devices and Systems Group, Singapore University of Technology and Design, Singapore, Singapore.

Funding

Agency for Science, Technology and Research (A*STAR) C220415015Agency for Science, Technology and Research (A*STAR) M21K2c0119Ministry of Education - Singapore (MOE) T2EP50121-0019National Research Foundation Singapore (National Research Foundation-Prime Minister's office, Republic of Singapore) NRF2022-QEP2-01-P08National Research Foundation Singapore (National Research Foundation-Prime Minister's office, Republic of Singapore) NRF-NRFI08-2022-0003
6 · The paper itself

Abstract

Ultra-low loss silicon nitride realized using deuterated precursors and low thermal budgets well within backend-of-line CMOS processing may accelerate widespread proliferation of their use.

Identifiers

PMID39231931
PMCPMC11374801

What OpenQuestion holds

Textmetadata
LicenceCC BY
Read underepoch 390

Registered trials

None linked

Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.