ArticlePolymers2024
Silica-Polymer Heterogeneous Hybrid Integrated Mach-Zehnder Interferometer Optical Waveguide Temperature Sensor.
Article in Polymers, 2024. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Not yet cited in PubMed.
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Abstract
In this paper, a temperature sensor based on a polymer-silica heterogeneous integrated Mach-Zehnder interferometer (MZI) structure is proposed. The MZI structure consists of a polymer waveguide arm and a doped silica waveguide arm. Due to the opposite thermal optical coefficients of polymers and silica, the hybrid integrated MZI structure enhances the temperature sensing characteristics. The direct coupling method and side coupling method are introduced to reduce the coupling loss of the device. The simulation results show that the side coupling structure has lower coupling loss and greater manufacturing tolerance compared to the direct coupling structure. The side coupling loss for PMMA material-based devices, NOA material-based devices, and SU-8 material-based devices is 0.104 dB, 0.294 dB, and 0.618 dB, respectively. The sensitivity (S) values of the three hybrid devices are -6.85 nm/K, -6.48 nm/K, and -2.30 nm/K, which are an order of magnitude higher than those of an all-polymer waveguide temperature sensor. We calculated the temperature responsivity (R
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