Resonant MEMS Accelerometer with Low Cross-Axis Sensitivity-Optimized Based on BP and NSGA-II Algorithms.

Jiaqi Miao, Pinghua Li, Mingchen Lv, Suzhen Nie, Yang Liu, Ruimei Liang, Weijiang Ma, Xuye Zhuang

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Article in Micromachines, 2024. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 2 papers.

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2citing papers in PubMed

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2 citing papers in PubMed.

Experimental Study on Temperature Compensation for Dual-Axis MEMS Accelerometers Using Adaptive Mode Decomposition and Hybrid Convolutional-Recurrent Temporal Network Modeling.Micromachines · 2025
Article
When-to-Loop: Enhanced Loop Closure for LiDAR SLAM in Urban Environments Based on SCAN CONTEXT.Micromachines · 2024
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8 authors.

Jiaqi MiaoCollege of Mechanical Engineering, Shandong University of Technology, Zibo 255000, China.

Pinghua LiCollege of Mechanical Engineering, Shandong University of Technology, Zibo 255000, China.

Mingchen LvCollege of Mechanical Engineering, Shandong University of Technology, Zibo 255000, China.

Suzhen NieCollege of Mechanical Engineering, Shandong University of Technology, Zibo 255000, China.

Yang LiuCollege of Mechanical Engineering, Shandong University of Technology, Zibo 255000, China.

Ruimei LiangCollege of Mechanical Engineering, Shandong University of Technology, Zibo 255000, China.

Weijiang MaCollege of Mechanical Engineering, Shandong University of Technology, Zibo 255000, China.

Xuye ZhuangCollege of Mechanical Engineering, Shandong University of Technology, Zibo 255000, China.

Funding

Natural Science Foundation of Shandong Province ZR2021MF042Taishan Scholars Program of Shandong Province tsqn201909108

6 · The paper itself

Abstract

This article proposes a low cross-axis sensitivity resonant MEMS(Micro-Electro-Mechanical Systems) accelerometer that is optimized based on the BP and NSGA-II algorithms. When resonant accelerometers are used in seismic monitoring, automotive safety systems, and navigation applications, high immunity and low cross-axis sensitivity are required. To improve the high immunity of the accelerometer, a coupling structure is introduced. This structure effectively separates the symmetric and antisymmetric mode frequencies of the DETF resonator and prevents mode coupling. To obtain higher detection accuracy and low cross-axis sensitivity, a decoupling structure is introduced. To find the optimal dimensional parameters of the decoupled structure, the BP and NSGA-II algorithms are used to optimize the dimensional parameters of the decoupled structure. The optimized decoupled structure has an axial stiffness of 6032.21 N/m and a transverse stiffness of 6.29 N/m. The finite element analysis results show that the sensitivity of the accelerometer is 59.1 Hz/g (

Indexed as

BP and NSGA-II algorithmcross-axis sensitivityMEMS resonant accelerometermulti-objective optimization

Identifiers

PMID39203700

DOI10.3390/mi15081049

PMCPMC11356109

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Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.