A Large-Scan-Range Electrothermal Micromirror Integrated with Thermal Convection-Based Position Sensors.

Anrun Ren, Yingtao Ding, Hengzhang Yang, Teng Pan, Ziyue Zhang, Huikai Xie

Abstract read

In one paragraph

Article in Micromachines, 2024. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Not yet cited in PubMed.

0numbers the graph read from it

0cells of the map it votes in

0citing papers in PubMed

–field-weighted citation impact

1 · What the graph read from it

What it found

Each row is one number read from the abstract, on the scale the paper reported it, with its interval. Left of the dashed line favours the treatment, right favours the comparator. Under each row is the sentence it came from. New to these charts? A ten-minute tutorial.

The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.

2 · The registry

The trial behind it

Trials whose registry record cites this paper, or whose number appears in the abstract. A trial that started after this paper was published is citing it as background, not reporting it.

Neither the registry nor the abstract names a trial number. If this is a trial report, that itself is worth knowing.

3 · Its place in the literature

Who cites it

0 citing papers in PubMed.

No citing paper in PubMed yet.

4 · The record

Corrections and comments

PubMed lists nothing against this paper. Absence here is not a guarantee, only a check that was made.

5 · Who and what money

Authors and funding

6 authors.

Anrun RenSchool of Integrated Circuits and Electronics, Beijing Institute of Technology, Beijing 100081, China.

Yingtao DingSchool of Integrated Circuits and Electronics, Beijing Institute of Technology, Beijing 100081, China.

Hengzhang YangSchool of Integrated Circuits and Electronics, Beijing Institute of Technology, Beijing 100081, China.

Teng PanSchool of Integrated Circuits and Electronics, Beijing Institute of Technology, Beijing 100081, China.ORCID 0000-0002-3978-7504

Ziyue ZhangSchool of Integrated Circuits and Electronics, Beijing Institute of Technology, Beijing 100081, China.ORCID 0000-0002-9218-7233

Huikai XieSchool of Integrated Circuits and Electronics, Beijing Institute of Technology, Beijing 100081, China.ORCID 0000-0002-8393-0021

Funding

National Key Research and Development Program of China 2023YFB3507300National Natural Science Foundation of China 6231101499, 92373105 and 62074015

6 · The paper itself

Abstract

This paper presents the design, simulation, fabrication, and characterization of a novel large-scan-range electrothermal micromirror integrated with a pair of position sensors. Note that the micromirror and the sensors can be manufactured within a single MEMS process flow. Thanks to the precise control of the fabrication of the grid-based large-size Al/SiO

Indexed as

electrothermal micromirrorlarge scan rangemirror plate position sensingthermal convection

Identifiers

PMID39203668

DOI10.3390/mi15081017

PMCPMC11356232

What OpenQuestion holds

Textmetadata

LicenceCC BY

Read underepoch 390

Registered trials

None linked

Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.