ArticleMicromachines2024
Design and Fabrication of Continuous Surface Optical Field Modulator for Angular Spectrum Discreteness Compensation.
Article in Micromachines, 2024. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Not yet cited in PubMed.
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6 authors.
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Abstract
The light homogenizing element is a crucial component of the illumination system of the lithography machine. Its primary purpose is to realize the uniform distribution of energy. However, it suffers from a common issue, which is angular spectrum discreteness, which significantly impacts light uniformity. To address this, we design and fabricate random micro-cylindrical lens arrays to obtain a small-angle Gaussian optical field, which can compensate for the angular spectrum discreteness. By adjusting the pitches and curvature radii of the micro-cylindrical lenses separately, we are able to manipulate the divergence angle of the emitted sub-beams, enabling precise angular spectrum modulation. By using mask-moving technology, the angular spectrum modulator is fabricated to generate a Gaussian illumination field. The surface profile is measured and determined with a structural roughness below 10 nm. Furthermore, optical test experiments on the modulator have been conducted, achieving an angle error of less than 0.02° and a balance better than 0.5%.
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