Evidence map›Paper›PMID 39203246›Full record

ArticleMaterials (Basel, Switzerland)2024

Stress Suppression Design for Radiofrequency Microelectromechanical System Switch Based on a Flexible Substrate.

Kang Wang, Zhaoer Chai, Yutang Pan, Chuyuan Gao, Yaxin Xu, Jiawei Ren, Jie Wang, Fei Zhao, Ming Qin, Lei Han

Abstract read
PubMed Full text at PMC Publisher
In one paragraph

Article in Materials (Basel, Switzerland), 2024. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Not yet cited in PubMed.

0numbers the graph read from it
0cells of the map it votes in
0citing papers in PubMed
–field-weighted citation impact
1 · What the graph read from it

What it found

Each row is one number read from the abstract, on the scale the paper reported it, with its interval. Left of the dashed line favours the treatment, right favours the comparator. Under each row is the sentence it came from. New to these charts? A ten-minute tutorial.

The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.

2 · The registry

The trial behind it

Trials whose registry record cites this paper, or whose number appears in the abstract. A trial that started after this paper was published is citing it as background, not reporting it.

Neither the registry nor the abstract names a trial number. If this is a trial report, that itself is worth knowing.

3 · Its place in the literature

Who cites it

0 citing papers in PubMed.

No citing paper in PubMed yet.

4 · The record

Corrections and comments

PubMed lists nothing against this paper. Absence here is not a guarantee, only a check that was made.

5 · Who and what money

Authors and funding

10 authors.

Kang WangKey Laboratory of MEMS of the Ministry of Education, Southeast University, Nanjing 210096, China.
Zhaoer ChaiNational Engineering Research Center of Communication Software and Asic Design, China Electronics Technology Group Corporation 54th Research Institute, Shijiazhuang 050081, China.
Yutang PanKey Laboratory of MEMS of the Ministry of Education, Southeast University, Nanjing 210096, China.ORCID 0009-0006-6101-1602
Chuyuan GaoKey Laboratory of MEMS of the Ministry of Education, Southeast University, Nanjing 210096, China.
Yaxin XuNational Engineering Research Center of Communication Software and Asic Design, China Electronics Technology Group Corporation 54th Research Institute, Shijiazhuang 050081, China.
Jiawei RenNational Engineering Research Center of Communication Software and Asic Design, China Electronics Technology Group Corporation 54th Research Institute, Shijiazhuang 050081, China.
Jie WangNational Engineering Research Center of Communication Software and Asic Design, China Electronics Technology Group Corporation 54th Research Institute, Shijiazhuang 050081, China.
Fei ZhaoNational Engineering Research Center of Communication Software and Asic Design, China Electronics Technology Group Corporation 54th Research Institute, Shijiazhuang 050081, China.
Ming QinKey Laboratory of MEMS of the Ministry of Education, Southeast University, Nanjing 210096, China.
Lei HanKey Laboratory of MEMS of the Ministry of Education, Southeast University, Nanjing 210096, China.ORCID 0000-0003-3504-5412

Funding

Aeronautical Science Foundation of China 20200028069001National Natural Science Foundation of China 62174027
6 · The paper itself

Abstract

A novel stress suppression design for flexible RF MEMS switches has been presented and demonstrated through theoretical and experimental research to isolate the stress caused by substrate bending. An RF MEMS switch with an S-shaped microspring structure was fabricated by the two-step etching process as a developmental step toward miniaturization and high reliability. The RF MEMS switches with an S-shaped microspring exhibited superior microwave performance and stable driving voltage under different substrate curvatures compared to the conventional non-microspring switches, demonstrating that the bending stress is successfully suppressed by the S-shaped microspring and the island structure. Furthermore, this innovative design could be easily extended to other flexible devices.

Indexed as

flexible substratemicrospring structureRF MEMS switchstresssubstrate bending

Identifiers

PMID39203246
PMCPMC11356640

What OpenQuestion holds

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Registered trials

None linked

Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.