Evaluation of the Diagnostic Sensitivity of Digital Vibration Sensors Based on Capacitive MEMS Accelerometers.

In recent years, there has been an increasing use of digital vibration sensors that are based on capacitive MEMS accelerometers for machine vibration monitoring and diagnostics. These sensors simplify the design of monitoring and diagnostic systems, thus reducing implementation costs. However, it is important to understand how effective these digital sensors are in detecting rolling bearing faults. This article describes a method for determining the diagnostic sensitivity of diagnostic parameters provided by commercially available vibration sensors based on MEMS accelerometers. Experimental tests were conducted in laboratory conditions, during which vibrations from 11 healthy and faulty rolling bearings were measured using two commercial vibration sensors based on MEMS accelerometers and a piezoelectric accelerometer as a reference sensor. The results showed that the diagnostic sensitivity of the parameters depends on the upper-frequency band limit of the sensors, and the parameters most sensitive to the typical fatigue faults of rolling bearings are the peak and peak-to-peak amplitudes of vibration acceleration. Despite having a lower upper-frequency range compared to the piezoelectric accelerometer, the commercial vibration sensors were found to be sensitive to rolling bearing faults and can be successfully used in continuous monitoring and diagnostics systems for machines.