Atomic Depth Image Transfer of Large-Area Optical Quartz Materials Based on Pulsed Ion Beam.

Shuyang Ran, Kefan Wen, Lingbo Xie, Xingyu Zhou, Ye Tian, Shuo Qiao, Feng Shi, Xing Peng

Abstract read

In one paragraph

Article in Micromachines, 2024. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Not yet cited in PubMed.

0numbers the graph read from it

0cells of the map it votes in

0citing papers in PubMed

–field-weighted citation impact

1 · What the graph read from it

What it found

Each row is one number read from the abstract, on the scale the paper reported it, with its interval. Left of the dashed line favours the treatment, right favours the comparator. Under each row is the sentence it came from. New to these charts? A ten-minute tutorial.

The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.

2 · The registry

The trial behind it

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Neither the registry nor the abstract names a trial number. If this is a trial report, that itself is worth knowing.

3 · Its place in the literature

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0 citing papers in PubMed.

No citing paper in PubMed yet.

4 · The record

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5 · Who and what money

Authors and funding

8 authors.

Shuyang RanCollege of Intelligent Science and Technology, National University of Defense Technology, Changsha 410073, China.ORCID 0009-0000-4155-8797

Kefan WenCollege of Intelligent Science and Technology, National University of Defense Technology, Changsha 410073, China.

Lingbo XieCollege of Intelligent Science and Technology, National University of Defense Technology, Changsha 410073, China.

Xingyu ZhouCollege of Intelligent Science and Technology, National University of Defense Technology, Changsha 410073, China.

Ye TianCollege of Intelligent Science and Technology, National University of Defense Technology, Changsha 410073, China.

Shuo QiaoCollege of Intelligent Science and Technology, National University of Defense Technology, Changsha 410073, China.

Feng ShiCollege of Intelligent Science and Technology, National University of Defense Technology, Changsha 410073, China.

Xing PengCollege of Intelligent Science and Technology, National University of Defense Technology, Changsha 410073, China.ORCID 0000-0002-6177-3715

Funding

National Natural Science Foundation of China 52305594National Natural Science Foundation of China 62175259Open Fund of Anhui Province Key Laboratory of Non-Destructive Evaluation CGHBMWSJC14Science and Technology Innovation Program of Hunan Province 2023JJ30079Science and Technology Innovation Program of Hunan Province 2024JJ6460

6 · The paper itself

Abstract

The high-efficiency preparation of large-area microstructures of optical materials and precision graphic etching technology is one of the most important application directions in the atomic and near-atomic-scale manufacturing industry. Traditional focused ion beam (FIB) and reactive ion etching (RIE) methods have limitations in precision and efficiency, hindering their application in automated mass production. The pulsed ion beam (PIB) method addresses these issues by enhancing ion beam deflection to achieve high-resolution material removal on a macro scale, which can reach the equivalent removal resolution of 6.4 × 10

Indexed as

atomic and near-atomic-scale fabricationoptical material processingpattern transferpulsed ion beamsub-nano precision manufacturing

Identifiers

PMID39064425

DOI10.3390/mi15070914

PMCPMC11279602

What OpenQuestion holds

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LicenceCC BY

Read underepoch 390

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Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.