Evidence map›Paper›PMID 39008811›Full record

ArticleLangmuir : the ACS journal of surfaces and colloids2024

Anisotropic Effects in Local Anodic Oxidation Nanolithography on Silicon Surfaces: Insights from ReaxFF Molecular Dynamics.

Jian Gao, Wenkun Xie, Xichun Luo, Yi Qin, Zhiyong Zhao

Abstract read
PubMed Full text at PMC Publisher
In one paragraph

Article in Langmuir : the ACS journal of surfaces and colloids, 2024. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 1 paper.

0numbers the graph read from it
0cells of the map it votes in
1citing papers in PubMed
–field-weighted citation impact
1 · What the graph read from it

What it found

Each row is one number read from the abstract, on the scale the paper reported it, with its interval. Left of the dashed line favours the treatment, right favours the comparator. Under each row is the sentence it came from. New to these charts? A ten-minute tutorial.

The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.

2 · The registry

The trial behind it

Trials whose registry record cites this paper, or whose number appears in the abstract. A trial that started after this paper was published is citing it as background, not reporting it.

Neither the registry nor the abstract names a trial number. If this is a trial report, that itself is worth knowing.

3 · Its place in the literature

Who cites it

1 citing paper in PubMed.

  1. Review
4 · The record

Corrections and comments

PubMed lists nothing against this paper. Absence here is not a guarantee, only a check that was made.

5 · Who and what money

Authors and funding

5 authors.

Jian GaoCentre for Precision Manufacturing, Department of Design, Manufacturing and Engineering Management, University of Strathclyde, Glasgow G1 1XJ, U.K.ORCID 0000-0001-7740-5274
Wenkun XieCentre for Precision Manufacturing, Department of Design, Manufacturing and Engineering Management, University of Strathclyde, Glasgow G1 1XJ, U.K.
Xichun LuoCentre for Precision Manufacturing, Department of Design, Manufacturing and Engineering Management, University of Strathclyde, Glasgow G1 1XJ, U.K.
Yi QinCentre for Precision Manufacturing, Department of Design, Manufacturing and Engineering Management, University of Strathclyde, Glasgow G1 1XJ, U.K.
Zhiyong ZhaoCentre for Precision Manufacturing, Department of Design, Manufacturing and Engineering Management, University of Strathclyde, Glasgow G1 1XJ, U.K.ORCID 0009-0006-1457-1359

Funding

No grant is acknowledged in the PubMed record.

6 · The paper itself

Abstract

Fully understanding the anisotropic effect of silicon surface orientations in local anodic oxidation (LAO) nanolithography processes is critical to the precise control of oxide quality and rate. This study used ReaxFF MD simulations to reveal the surface anisotropic effects in the LAO through the analysis of adsorbed species, atomic charge, and oxide growth. Our results show that the LAO behaves differently on silicon (100), (110), and (111) surfaces. Specifically, the application of an electric field significantly increases the quantity of surface-adsorbed -OH

Identifiers

PMID39008811
PMCPMC11295202

What OpenQuestion holds

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LicenceCC BY
Read underepoch 390

Registered trials

None linked

Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.