Design, Fabrication, Characterization, and Simulation of AlN-Based Piezoelectric Micromachined Ultrasonic Transducer for Sonar Imaging Applications.

Wenxing Chen, Shenglin Ma, Xiaoyi Lai, Zhizhen Wang, Hui Zhao, Qiang Zha, Yihsiang Chiu, Yufeng Jin

Abstract read

In one paragraph

Article in Micromachines, 2024. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 1 paper.

0numbers the graph read from it

0cells of the map it votes in

1citing papers in PubMed

–field-weighted citation impact

1 · What the graph read from it

What it found

Each row is one number read from the abstract, on the scale the paper reported it, with its interval. Left of the dashed line favours the treatment, right favours the comparator. Under each row is the sentence it came from. New to these charts? A ten-minute tutorial.

The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.

2 · The registry

The trial behind it

Trials whose registry record cites this paper, or whose number appears in the abstract. A trial that started after this paper was published is citing it as background, not reporting it.

Neither the registry nor the abstract names a trial number. If this is a trial report, that itself is worth knowing.

3 · Its place in the literature

Who cites it

1 citing paper in PubMed.

A NovelMicromachines · 2025
Article

4 · The record

Corrections and comments

PubMed lists nothing against this paper. Absence here is not a guarantee, only a check that was made.

5 · Who and what money

Authors and funding

8 authors.

Wenxing ChenDepartment of Mechanical & Electrical Engineering, Xiamen University, Xiamen 361005, China.

Shenglin MaDepartment of Mechanical & Electrical Engineering, Xiamen University, Xiamen 361005, China.ORCID 0000-0002-3481-3929

Xiaoyi LaiDepartment of Mechanical & Electrical Engineering, Xiamen University, Xiamen 361005, China.

Zhizhen WangDepartment of Mechanical & Electrical Engineering, Xiamen University, Xiamen 361005, China.

Hui ZhaoThe Fifth Research Laboratory, Shanghai Marine Electronic Equipment Research Institute, Shanghai 201108, China.

Qiang ZhaNanofabrication Facility, Suzhou Institute of Nano-Tech and Nano-Bionics, Chinese Academy of Sciences, Suzhou 215123, China.

Yihsiang ChiuSchool of Electronic and Computer Engineering, Peking University Shenzhen Graduate School, Shenzhen 518055, China.

Yufeng JinSchool of Electronic and Computer Engineering, Peking University Shenzhen Graduate School, Shenzhen 518055, China.

Funding

No grant is acknowledged in the PubMed record.

6 · The paper itself

Abstract

To address the requirements of sonar imaging, such as high receiving sensitivity, a wide bandwidth, and a wide receiving angle, an AlN PMUT with an optimized ratio of 0.6 for the piezoelectric layer diameter to backside cavity diameter is proposed in this paper. A sample AlN PMUT is designed and fabricated with the SOI substrate-based bulk MEMS process. The characterization test result of the sample demonstrates a -6 dB bandwidth of approximately 500 kHz and a measured receiving sensitivity per unit area of 1.37 V/μPa/mm

Indexed as

acoustic characteristics simulation modelAlN PMUTreceiving sensitivity

Identifiers

PMID38930750

DOI10.3390/mi15060781

PMCPMC11205683

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Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.