Fast, Efficient Tailoring Growth of Nanocrystalline Diamond Films by Fine-Tuning of Gas-Phase Composition Using Microwave Plasma Chemical Vapor Deposition.

Chunjiu Tang, Antonio J S Fernandes, Margarida Facao, Alexandre F Carvalho, Weixia Chen, Haihong Hou, Florinda M Costa

Abstract read

In one paragraph

Article in Materials (Basel, Switzerland), 2024. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Not yet cited in PubMed.

0numbers the graph read from it

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0citing papers in PubMed

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1 · What the graph read from it

What it found

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The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.

2 · The registry

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3 · Its place in the literature

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0 citing papers in PubMed.

No citing paper in PubMed yet.

4 · The record

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5 · Who and what money

Authors and funding

7 authors.

Chunjiu TangSchool of Electronic and Information Engineering, Changshu Institute of Technology, Changshu 215500, China.ORCID 0000-0001-5375-9537

Antonio J S FernandesDepartment of Physics, I3N (Institute for Nanostructures, Nanomodelling and Nanofabrication), University of Aveiro, 3810-193 Aveiro, Portugal.ORCID 0000-0002-4376-5594

Margarida FacaoDepartment of Physics, I3N (Institute for Nanostructures, Nanomodelling and Nanofabrication), University of Aveiro, 3810-193 Aveiro, Portugal.ORCID 0000-0002-2417-6743

Alexandre F CarvalhoDepartment of Physics, I3N (Institute for Nanostructures, Nanomodelling and Nanofabrication), University of Aveiro, 3810-193 Aveiro, Portugal.

Weixia ChenSchool of Electronic and Information Engineering, Changshu Institute of Technology, Changshu 215500, China.

Haihong HouSchool of Electronic and Information Engineering, Changshu Institute of Technology, Changshu 215500, China.

Florinda M CostaDepartment of Physics, I3N (Institute for Nanostructures, Nanomodelling and Nanofabrication), University of Aveiro, 3810-193 Aveiro, Portugal.ORCID 0000-0001-8729-714X

Funding

FCT and MEC UIDB/50025/2020, UIDP/50025/2020, LA/P/0037/2020The National Science Foundation (NSF) of China 51972035

6 · The paper itself

Abstract

Nanocrystalline diamond (NCD) films are attractive for many applications due to their smooth surfaces while holding the properties of diamond. However, their growth rate is generally low using common Ar/CH

Indexed as

high growth ratemicrowave plasma chemical vapor deposition (MPCVD)nanocrystalline diamond filmsnitrogen and oxygen additivessurface roughness

Identifiers

PMID38930344

DOI10.3390/ma17122976

PMCPMC11205745

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