Effect of Secondary Foaming on the Structural Properties of Polyurethane Polishing Pad.

Minxuan Chen, Zhenlin Jiang, Min Zhu, Baoxiu Wang, Jiapeng Chen, Wenjun Wang

Abstract read

In one paragraph

Article in Materials (Basel, Switzerland), 2024. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 1 paper.

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1citing papers in PubMed

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1 · What the graph read from it

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2 · The registry

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3 · Its place in the literature

Who cites it

1 citing paper in PubMed.

Preparations of Polyurethane Foam Composite (PUFC) Pads Containing Micro-/Nano-Crystalline Cellulose (MCC/NCC) toward the Chemical Mechanical Polishing Process.Polymers · 2024
Article

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PubMed lists nothing against this paper. Absence here is not a guarantee, only a check that was made.

5 · Who and what money

Authors and funding

6 authors.

Minxuan ChenCollege of Chemistry and Chemical Engineering, Advanced Materials Research Center for Nano Manufacturing, Shanghai University of Engineering Science, Shanghai 201620, China.

Zhenlin JiangCollege of Chemistry and Chemical Engineering, Advanced Materials Research Center for Nano Manufacturing, Shanghai University of Engineering Science, Shanghai 201620, China.

Min ZhuCollege of Chemistry and Chemical Engineering, Advanced Materials Research Center for Nano Manufacturing, Shanghai University of Engineering Science, Shanghai 201620, China.

Baoxiu WangCollege of Chemistry and Chemical Engineering, Advanced Materials Research Center for Nano Manufacturing, Shanghai University of Engineering Science, Shanghai 201620, China.

Jiapeng ChenCollege of Chemistry and Chemical Engineering, Advanced Materials Research Center for Nano Manufacturing, Shanghai University of Engineering Science, Shanghai 201620, China.

Wenjun WangCollege of Chemistry and Chemical Engineering, Advanced Materials Research Center for Nano Manufacturing, Shanghai University of Engineering Science, Shanghai 201620, China.

Funding

National Natural Science Foundation of China 52075318Shanghai "Yangfan Plan" Talent Project 19YF1417800

6 · The paper itself

Abstract

Polyurethane polishing pads are important in chemical mechanical polishing (CMP). Thus, understanding how to decrease the density but increase the porosity is a crucial aspect of improving the efficiency of a polyurethane polishing pad. According to the principle of gas generation by thermal decomposition of sodium bicarbonate and ammonium bicarbonate, polyurethane polishing pad was prepared by a secondary foaming method. The influence of adding such an inorganic foaming agent as an auxiliary foaming agent on the structure, physical properties, and mechanical properties of polyurethane polishing pads was discussed. The results showed that compared with the polyurethane polishing pad without an inorganic foaming agent, the open-pore structure increased, the density decreased, and the porosity and water absorption increased significantly. The highest porosity and material removal rate (MRR) with sodium bicarbonate added was 3.3% higher than those without sodium bicarbonate and 33.8% higher than those without sodium bicarbonate. In addition, the highest porosity and MRR with ammonium bicarbonate were 7.2% higher and 47.8% higher than those without ammonium bicarbonate. Therefore, it was finally concluded that the optimum amount of sodium bicarbonate to be added was 3 wt%, and the optimum amount of ammonium bicarbonate to be added was 1 wt%.

Indexed as

ammonium bicarbonatepolyurethane polishing padporositysodium hydrogen carbonate

Identifiers

PMID38894023

DOI10.3390/ma17112759

PMCPMC11173749

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