ArticleNature communications2024
A zinc oxide resonant nano-accelerometer with ultra-high sensitivity.
Article in Nature communications, 2024. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 3 papers.
What it found
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The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.
The trial behind it
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Who cites it
3 citing papers in PubMed.
- Scalable low-thermal-budget fabrication of suspended silicon nanowire devices.Microsystems & nanoengineering · 2026Article
- Design and Fabrication of High-Frequency Resonant Micro-Accelerometer Based on Piezoelectric Stiffening Effect.Micromachines · 2026Article
- On the Mode Localization Between Two Unidentical Resonators with Different Bending Modes for Acceleration Sensing.Sensors (Basel, Switzerland) · 2025Article
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Authors and funding
12 authors.
Funding
Abstract
Nanoelectromechanical system accelerometers have the potential to be utilized in next-generation consumer electronics, inertial navigation, and seismology due to their low cost, small size, and low power consumption. There is an urgent need to develop resonant accelerometer with high sensitivity, precision and robustness. Here, a zinc oxide resonant nano-accelerometer with high sensitivity has been designed and prototyped using zinc oxide nanowires. Within a device two nanowires were symmetrically placed close to a notched flexure to evaluate acceleration based on differential resonant frequencies. Additionally, microleverages were integrated in the accelerometer to enhance its sensitivity by amplifying the inertial force. High performance of the accelerometer has been demonstrated by the measured absolute sensitivity (16.818 kHz/g), bias instability (13.13 μg at 1.2 s integration time) and bandwidth (from 4.78 to 29.64 kHz), respectively. These results suggest that zinc oxide nanowires could be a candidate to develop future nanoelectromechanical resonant accelerometer potentially used for inertial navigation, tilt measurement, and geophysical measurements.
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Registered trials
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