ArticleFrontiers of optoelectronics2024
MEMS-actuated terahertz metamaterials driven by phase-transition materials.
Article in Frontiers of optoelectronics, 2024. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 2 papers.
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Who cites it
2 citing papers in PubMed.
- Terahertz MEMS actuators and applications.Microsystems & nanoengineering · 2026Review
- High-quality polycrystalline vanadium dioxide thin films deposited via pulsed laser deposition with high uniformity and consistency.Journal of materials science. Materials in electronics · 2025Article
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Authors and funding
8 authors.
Funding
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Abstract
The non-ionizing and penetrative characteristics of terahertz (THz) radiation have recently led to its adoption across a variety of applications. To effectively utilize THz radiation, modulators with precise control are imperative. While most recent THz modulators manipulate the amplitude, frequency, or phase of incident THz radiation, considerably less progress has been made toward THz polarization modulation. Conventional methods for polarization control suffer from high driving voltages, restricted modulation depth, and narrow band capabilities, which hinder device performance and broader applications. Consequently, an ideal THz modulator that offers high modulation depth along with ease of processing and operation is required. In this paper, we propose and realize a THz metamaterial comprised of microelectromechanical systems (MEMS) actuated by the phase-transition material vanadium dioxide (VO
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