ArticleACS applied energy materials2024
Zirconium Oxynitride Thin Films for Photoelectrochemical Water Splitting.
Article in ACS applied energy materials, 2024. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 2 papers.
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Who cites it
2 citing papers in PubMed.
- OxideRSC advances · 2026Article
- The Modification of Nitrogen to Modulate Perovskite for the Application of p-Type Transparent Conductive Oxides.Molecules (Basel, Switzerland) · 2026Article
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Authors and funding
10 authors.
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Abstract
Transition metal oxynitrides are a promising class of functional materials for photoelectrochemical (PEC) applications. Although these compounds are most commonly synthesized via ammonolysis of oxide precursors, such synthetic routes often lead to poorly controlled oxygen-to-nitrogen anion ratios, and the harsh nitridation conditions are incompatible with many substrates, including transparent conductive oxides. Here, we report direct reactive sputter deposition of a family of zirconium oxynitride thin films and the comprehensive characterization of their tunable structural, optical, and functional PEC properties. Systematic increases of the oxygen content in the reactive sputter gas mixture enable access to different crystalline structures within the zirconium oxynitride family. Increasing oxygen contents lead to a transition from metallic to semiconducting to insulating phases. In particular, crystalline Zr
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