Evidence map›Paper›PMID 38732996›Full record

ArticleSensors (Basel, Switzerland)2024

Nanoscale Three-Dimensional Imaging of Integrated Circuits Using a Scanning Electron Microscope and Transition-Edge Sensor Spectrometer.

Nathan Nakamura, Paul Szypryt, Amber L Dagel, Bradley K Alpert, Douglas A Bennett, William Bertrand Doriese, Malcolm Durkin, Joseph W Fowler, Dylan T Fox, Johnathon D Gard and 23 more

Abstract read
PubMed Full text at PMC Publisher
In one paragraph

Article in Sensors (Basel, Switzerland), 2024. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Not yet cited in PubMed.

0numbers the graph read from it
0cells of the map it votes in
0citing papers in PubMed
–field-weighted citation impact
1 · What the graph read from it

What it found

Each row is one number read from the abstract, on the scale the paper reported it, with its interval. Left of the dashed line favours the treatment, right favours the comparator. Under each row is the sentence it came from. New to these charts? A ten-minute tutorial.

The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.

2 · The registry

The trial behind it

Trials whose registry record cites this paper, or whose number appears in the abstract. A trial that started after this paper was published is citing it as background, not reporting it.

Neither the registry nor the abstract names a trial number. If this is a trial report, that itself is worth knowing.

3 · Its place in the literature

Who cites it

0 citing papers in PubMed.

No citing paper in PubMed yet.

4 · The record

Corrections and comments

PubMed lists nothing against this paper. Absence here is not a guarantee, only a check that was made.

5 · Who and what money

Authors and funding

33 authors.

Nathan NakamuraNational Institute of Standards and Technology, Boulder, CO 80305, USA.ORCID 0000-0001-8648-0524
Paul SzyprytNational Institute of Standards and Technology, Boulder, CO 80305, USA.ORCID 0000-0002-0184-3419
Amber L DagelSandia National Laboratories, Albuquerque, NM 87123, USA.ORCID 0000-0002-5882-1640
Bradley K AlpertNational Institute of Standards and Technology, Boulder, CO 80305, USA.
Douglas A BennettNational Institute of Standards and Technology, Boulder, CO 80305, USA.
William Bertrand DorieseNational Institute of Standards and Technology, Boulder, CO 80305, USA.ORCID 0000-0003-1107-6441
Malcolm DurkinNational Institute of Standards and Technology, Boulder, CO 80305, USA.
Joseph W FowlerNational Institute of Standards and Technology, Boulder, CO 80305, USA.ORCID 0000-0002-8079-0895
Dylan T FoxSandia National Laboratories, Albuquerque, NM 87123, USA.
Johnathon D GardNational Institute of Standards and Technology, Boulder, CO 80305, USA.
Ryan N GoodnerSandia National Laboratories, Albuquerque, NM 87123, USA.
James Zachariah HarrisSandia National Laboratories, Albuquerque, NM 87123, USA.
Gene C HiltonNational Institute of Standards and Technology, Boulder, CO 80305, USA.
Edward S JimenezSandia National Laboratories, Albuquerque, NM 87123, USA.
Burke L KernenSandia National Laboratories, Albuquerque, NM 87123, USA.
Kurt W LarsonSandia National Laboratories, Albuquerque, NM 87123, USA.
Zachary H LevineNational Institute of Standards and Technology, Gaithersburg, MD 20899, USA.ORCID 0000-0002-9928-276X
Daniel McArthurSandia National Laboratories, Albuquerque, NM 87123, USA.
Kelsey M MorganNational Institute of Standards and Technology, Boulder, CO 80305, USA.
Galen C O'NeilNational Institute of Standards and Technology, Boulder, CO 80305, USA.ORCID 0000-0003-3450-2263
Nathan J OrtizNational Institute of Standards and Technology, Boulder, CO 80305, USA.
Christine G PappasNational Institute of Standards and Technology, Boulder, CO 80305, USA.
Carl D ReintsemaNational Institute of Standards and Technology, Boulder, CO 80305, USA.
Daniel R SchmidtNational Institute of Standards and Technology, Boulder, CO 80305, USA.
Peter A SchultzSandia National Laboratories, Albuquerque, NM 87123, USA.ORCID 0000-0002-0179-9710
Kyle R ThompsonSandia National Laboratories, Albuquerque, NM 87123, USA.
Joel N UllomNational Institute of Standards and Technology, Boulder, CO 80305, USA.
Leila ValeNational Institute of Standards and Technology, Boulder, CO 80305, USA.
Courtenay T VaughanSandia National Laboratories, Albuquerque, NM 87123, USA.
Christopher WalkerSandia National Laboratories, Albuquerque, NM 87123, USA.
Joel C WeberNational Institute of Standards and Technology, Boulder, CO 80305, USA.
Jason W WheelerSandia National Laboratories, Albuquerque, NM 87123, USA.
Daniel S SwetzNational Institute of Standards and Technology, Boulder, CO 80305, USA.ORCID 0000-0002-8192-2175

Funding

Office of the Director of National Intelligence FA8702-15-D-0001United States Department of Commerce 70NANB18H006
6 · The paper itself

Abstract

X-ray nanotomography is a powerful tool for the characterization of nanoscale materials and structures, but it is difficult to implement due to the competing requirements of X-ray flux and spot size. Due to this constraint, state-of-the-art nanotomography is predominantly performed at large synchrotron facilities. We present a laboratory-scale nanotomography instrument that achieves nanoscale spatial resolution while addressing the limitations of conventional tomography tools. The instrument combines the electron beam of a scanning electron microscope (SEM) with the precise, broadband X-ray detection of a superconducting transition-edge sensor (TES) microcalorimeter. The electron beam generates a highly focused X-ray spot on a metal target held micrometers away from the sample of interest, while the TES spectrometer isolates target photons with a high signal-to-noise ratio. This combination of a focused X-ray spot, energy-resolved X-ray detection, and unique system geometry enables nanoscale, element-specific X-ray imaging in a compact footprint. The proof of concept for this approach to X-ray nanotomography is demonstrated by imaging 160 nm features in three dimensions in six layers of a Cu-SiO

Indexed as

computed tomographyintegrated circuitsX-ray imagingX-ray nanotomography

Identifiers

PMID38732996
PMCPMC11086152

What OpenQuestion holds

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LicenceCC BY
Read underepoch 390

Registered trials

None linked

Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.