MEMS Resonant Beam with Outstanding Uniformity of Sensitivity and Temperature Distribution for Accurate Gas Sensing and On-Chip TGA.

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Article in Sensors (Basel, Switzerland), 2024. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 1 paper.

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1citing papers in PubMed

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1 citing paper in PubMed.

Non-Invasive Wide-Field Imaging of Chip Surface Temperature Distribution Based on Ensemble Diamond Nitrogen-Vacancy Centers.Sensors (Basel, Switzerland) · 2025
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4 authors.

Zheng LuSchool of Materials and Chemistry, University of Shanghai for Science and Technology, Shanghai 200093, China.

Hao JiaState Key Laboratory of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China.ORCID 0000-0002-1429-6995

Ding WangSchool of Materials and Chemistry, University of Shanghai for Science and Technology, Shanghai 200093, China.ORCID 0000-0002-2863-9303

Haitao YuState Key Laboratory of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China.

Funding

No grant is acknowledged in the PubMed record.

6 · The paper itself

Abstract

Micromechanical resonators have aroused growing interest as biological and chemical sensors, and microcantilever beams are the main research focus. Recently, a resonant microcantilever with an integrated heater has been applied in on-chip thermogravimetric analysis (TGA). However, there is a strong relationship between the mass sensitivity of a resonant microcantilever and the location of adsorbed masses. Different sampling positions will cause sensitivity differences, which will result in an inaccurate calculation of mass change. Herein, an integrated H-shaped resonant beam with uniform mass sensitivity and temperature distribution is proposed and developed to improve the accuracy of bio/chemical sensing and TGA applications. Experiments verified that the presented resonant beam possesses much better uniformity of sensitivity and temperature distribution compared with resonant microcantilevers. Gas-sensing and TGA experiments utilizing the integrated resonant beam were also carried out and exhibited good measurement accuracy.

Indexed as

gas sensingmicrocantileverresonant beamresonatorTGAuniformity

Identifiers

PMID38676112

DOI10.3390/s24082495

PMCPMC11054474

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Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.