Evidence map›Paper›PMID 38651281›Full record

ArticleACS applied materials & interfaces2024

Atmospheric Gas-Phase Catalyst Etching of SiO

Ko-Hei Sano, Yoshitaka Ono, Ryosuke Tobinaga, Yutaka Imamura, Yasuo Hayashi, Takahiko Yanagitani

Abstract read
In one paragraph

Article in ACS applied materials & interfaces, 2024. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 1 paper.

0numbers the graph read from it
0cells of the map it votes in
1citing papers in PubMed
–field-weighted citation impact
1 · What the graph read from it

What it found

Each row is one number read from the abstract, on the scale the paper reported it, with its interval. Left of the dashed line favours the treatment, right favours the comparator. Under each row is the sentence it came from. New to these charts? A ten-minute tutorial.

The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.

2 · The registry

The trial behind it

Trials whose registry record cites this paper, or whose number appears in the abstract. A trial that started after this paper was published is citing it as background, not reporting it.

Neither the registry nor the abstract names a trial number. If this is a trial report, that itself is worth knowing.

3 · Its place in the literature

Who cites it

1 citing paper in PubMed.

  1. Article
4 · The record

Corrections and comments

PubMed lists nothing against this paper. Absence here is not a guarantee, only a check that was made.

5 · Who and what money

Authors and funding

6 authors.

Ko-Hei SanoGraduate School of Advanced Science and Engineering, Waseda University, Tokyo 169-8555, Japan.ORCID 0009-0009-9413-8847
Yoshitaka OnoInnovative Technology Laboratories, AGC Incorporated, Kanagawa 230-0045, Japan.
Ryosuke TobinagaInnovative Technology Laboratories, AGC Incorporated, Kanagawa 230-0045, Japan.
Yutaka ImamuraInnovative Technology Laboratories, AGC Incorporated, Kanagawa 230-0045, Japan.
Yasuo HayashiInnovative Technology Laboratories, AGC Incorporated, Kanagawa 230-0045, Japan.
Takahiko YanagitaniGraduate School of Advanced Science and Engineering, Waseda University, Tokyo 169-8555, Japan.

Funding

No grant is acknowledged in the PubMed record.

6 · The paper itself

Abstract

Micro/nanoscale structure fabrication is an important process for designing miniaturized devices. Recently, three-dimensional (3D) integrated circuits using SiO

Indexed as

deep microfabricationgas-phase catalyst etchingHF gasorganocatalystSiO2smooth-sidewall surface

Identifiers

PMID38651281
PMCPMC11071037

What OpenQuestion holds

Textmetadata
LicenceCC BY
Read underepoch 390

Registered trials

None linked

Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.