ArticleACS applied electronic materials2024
Conformal High-Aspect-Ratio Solid Electrolyte Thin Films for Li-Ion Batteries by Atomic Layer Deposition.
Article in ACS applied electronic materials, 2024. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 5 papers.
What it found
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Who cites it
5 citing papers in PubMed.
- Microfabrication Strategies for Silicon Anodes in On-Chip and Miniaturized Batteries.Micromachines · 2026Review
- Vapor Deposition Engineering for Thin-Film Microbatteries: From Nanoscale Ionics to Interface-Integrated Architectures.Nano-micro letters · 2026Review
- Atomic Layer Deposition of Aluminum Phosphorus Oxynitride and Its Application as a Passivation Layer on Aluminum Metal Anode.Small (Weinheim an der Bergstrasse, Germany) · 2026Article
- Rare Mononuclear Lithium-Carbene Complex for Atomic Layer Deposition of Lithium Containing Thin Films.Angewandte Chemie (International ed. in English) · 2025Article
- Role of the Coreactant on the Dual-Source Behavior of Lithium Hexamethyldisilazide for ALD Li-Containing Films.The journal of physical chemistry. C, Nanomaterials and interfaces · 2024Article
Corrections and comments
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Authors and funding
4 authors.
Funding
No grant is acknowledged in the PubMed record.
Abstract
Lithium phosphorus oxynitride (LiPON) is a state-of-the-art solid electrolyte material for thin-film microbatteries. These applications require conformal thin films on challenging 3D surface structures, and among the advanced thin-film deposition techniques, atomic layer deposition (ALD) is believed to stand out in terms of producing appreciably conformal thin films. Here we quantify the conformality (i.e., the evenness of deposition) of thin ALD-grown LiPON films using lateral high-aspect-ratio test structures. Two different lithium precursors, lithium
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Registered trials
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