ArticleNature communications2024
Monolithic back-end-of-line integration of phase change materials into foundry-manufactured silicon photonics.
Article in Nature communications, 2024. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 15 papers.
What it found
Each row is one number read from the abstract, on the scale the paper reported it, with its interval. Left of the dashed line favours the treatment, right favours the comparator. Under each row is the sentence it came from. New to these charts? A ten-minute tutorial.
The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.
The trial behind it
Trials whose registry record cites this paper, or whose number appears in the abstract. A trial that started after this paper was published is citing it as background, not reporting it.
Neither the registry nor the abstract names a trial number. If this is a trial report, that itself is worth knowing.
Who cites it
15 citing papers in PubMed.
- Emerging integrated photonic neural network technologies for artificial intelligence: from devices to systems.National science review · 2026Review
- Integrated Neuromorphic Photonic Computing for AI Acceleration: Emerging Devices, Network Architectures, and Future Paradigms.Advanced materials (Deerfield Beach, Fla.) · 2026Review
- WDM-enabled multi-core parallel programmable photonic signal processor.Nature communications · 2026Article
- Pixelated electrically driven SbNature communications · 2026Article
- Compact photonic spiking neuron with inherent stochasticity based on phase-change material for probabilistic computing.Nature communications · 2026Article
- Article
- Femto-joule threshold reconfigurable all-optical nonlinear activators for picosecond pulsed optical neural networks.Light, science & applications · 2026Article
- In-memory multilevel control of generic SO(m) holonomy in photonics.Nature communications · 2026Article
- Non-volatile tuning of cryogenic silicon photonic micro-ring modulators.Nature communications · 2025Article
- Nonvolatile silicon photonic MEMS switches enabled by van der Waals force.Science advances · 2025Article
- Heterogeneous Integration Technology Drives the Evolution of Co-Packaged Optics.Micromachines · 2025Review
- PZT optical memristors.Nature communications · 2025Article
- Phase and amplitude gradient waveguide coupled metasurfaces.Scientific reports · 2025Article
- Article
- Ultracompact Programmable Silicon Photonics Using Layers of Low-Loss Phase-Change Material SbACS photonics · 2025Article
Corrections and comments
PubMed lists nothing against this paper. Absence here is not a guarantee, only a check that was made.
Authors and funding
16 authors.
Funding
Abstract
Monolithic integration of novel materials without modifying the existing photonic component library is crucial to advancing heterogeneous silicon photonic integrated circuits. Here we show the introduction of a silicon nitride etch stop layer at select areas, coupled with low-loss oxide trench, enabling incorporation of functional materials without compromising foundry-verified device reliability. As an illustration, two distinct chalcogenide phase change materials (PCMs) with remarkable nonvolatile modulation capabilities, namely Sb
Identifiers
What OpenQuestion holds
Registered trials
Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.