Preparation of high-resolution micro/nano dot array by electrohydrodynamic jet printing with enhanced uniformity.

Yiwei Jin, Ziwei Zhao, Jiankui Chen, Wei Chen, Guozhen Wang, Zhouping Yin

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Article in Scientific reports, 2024. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Not yet cited in PubMed.

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5 · Who and what money

Authors and funding

6 authors.

Yiwei Jin *The State Key Laboratory of Intelligent Manufacturing Equipment and Technology, School of Mechanical Science and Engineering, HuaZhong University of Science and Technology, Wuhan, 430070, China.

Ziwei Zhao *The State Key Laboratory of Intelligent Manufacturing Equipment and Technology, School of Mechanical Science and Engineering, HuaZhong University of Science and Technology, Wuhan, 430070, China.

Jiankui ChenThe State Key Laboratory of Intelligent Manufacturing Equipment and Technology, School of Mechanical Science and Engineering, HuaZhong University of Science and Technology, Wuhan, 430070, China. chenjk@hust.edu.cn.

Wei ChenThe State Key Laboratory of Intelligent Manufacturing Equipment and Technology, School of Mechanical Science and Engineering, HuaZhong University of Science and Technology, Wuhan, 430070, China. chen_w@hust.edu.cn.

Guozhen WangThe State Key Laboratory of Intelligent Manufacturing Equipment and Technology, School of Mechanical Science and Engineering, HuaZhong University of Science and Technology, Wuhan, 430070, China.

Zhouping YinThe State Key Laboratory of Intelligent Manufacturing Equipment and Technology, School of Mechanical Science and Engineering, HuaZhong University of Science and Technology, Wuhan, 430070, China.

Funding

Innovation Project of Optics Valley Laboratory OVL2021BG007National Key Research and Development Program of China 2018YFA0703203National Natural Science Foundation of China 51975236

6 · The paper itself

Abstract

The high-resolution array is the basic structure of most kinds of microelectronics. Electrohydrodynamic jet (E-Jet) printing technology is widely applied in manufacturing array structures with high resolution, high material compatibility and multi-modal printing. It is still challenging to acquire high uniformity of printed array with micro-nanometer resolution, which greatly influences the performance and lifetime of the microelectronics. In this paper, to improve the uniformity of the printed array, the influence of each parameter on the uniformity of the E-jet printed dot array is studied on the cobuilt NEJ-E/P200 experimental platform, finding the applied voltage plays the most important role in maintaining the uniformity of the printed array. By appropriately adjusting the printing parameters, the dot arrays with different resolutions from 500 pixels per inch (PPI) to 17,000 PPI are successfully printed. For arrays below and over 10,000 PPI, the deviations of the uniformity are within 5% and 10% respectively. In this work, the dot array over 15,000 PPI is first implemented using E-jet printing. The conclusions acquired by experimental analysis of dot array printing process are of great importance in high resolution array printing as it provides practical guidance for parameters adjustment.

Identifiers

PMID38521866

DOI10.1038/s41598-024-57225-5

PMCPMC10960794

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Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.