ReviewNature nanotechnology2024
Ultrahigh-quality-factor micro- and nanomechanical resonators using dissipation dilution.
Review in Nature nanotechnology, 2024. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 17 papers.
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Who cites it
17 citing papers in PubMed.
- Thermally-modulated dissipation dilution in 2D NEMS resonators with explicit model and temperature-stable damping.Microsystems & nanoengineering · 2026Article
- Energy Dissipation in WSeThe journal of physical chemistry letters · 2026Article
- Manufacturing of 8 million Q-factor micro hemispherical resonator gyroscopes via patterned coating technology.Microsystems & nanoengineering · 2026Article
- Multiscale Analysis of Size-Dependent Vibration of Graphene Nanoelectromechanical Resonators.Micromachines · 2026Article
- Highly stable diamagnetically levitated mechanical resonators with large masses exceeding 1.5 gram.Microsystems & nanoengineering · 2026Article
- The 2026 guided acoustic waves roadmap.Journal of physics D: Applied physics · 2026Review
- Enhanced Sensitivity of Sub-THz Thermomechanical Bolometers Exploiting Vibrational Nonlinearity.ACS photonics · 2026Article
- Topology Optimization of High-Performance Optomechanical Resonator.Advanced science (Weinheim, Baden-Wurttemberg, Germany) · 2026Article
- Non-contact friction in ultracoherent nanomechanical resonators near dielectric materials.Nature physics · 2026Article
- Magnetic Trampoline Resonators Made of (La,Sr)MnOACS sensors · 2025Article
- A soft-clamped topological waveguide for phonons.Nature · 2025Article
- Oxide Membranes from Bulk Micro-Machining of SrTiOAdvanced science (Weinheim, Baden-Wurttemberg, Germany) · 2025Article
- Degeneracy-breaking and long-lived multimode microwave electromechanical systems enabled by cubic silicon-carbide membrane crystals.Nature communications · 2025Article
- High Quality-Factor All-Dielectric Metacavity for Label-Free Biosensing.Advanced science (Weinheim, Baden-Wurttemberg, Germany) · 2025Article
- High-purity quantum optomechanics at room temperature.Nature physics · 2025Article
- Stress-Dependent Optical Extinction in Low-Pressure Chemical Vapor Deposition Silicon Nitride Measured by Nanomechanical Photothermal Sensing.Nano letters · 2024Article
- Tuning light by the vibes.Nature nanotechnology · 2024Article
Corrections and comments
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Authors and funding
3 authors.
Funding
Abstract
Mechanical resonators are widely used in sensors, transducers and optomechanical systems, where mechanical dissipation sets the ultimate limit to performance. Over the past 15 years, the quality factors in strained mechanical resonators have increased by four orders of magnitude, surpassing the previous state of the art achieved in bulk crystalline resonators at room temperature and liquid helium temperatures. In this Review, we describe how these advances were made by leveraging 'dissipation dilution'-where dissipation is reduced through a combination of static tensile strain and geometric nonlinearity in dynamic strain. We then review the state of the art in strained nanomechanical resonators and discuss the potential for even higher quality factors in crystalline materials. Finally, we detail current and future applications of dissipation-diluted mechanical resonators.
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38443697What OpenQuestion holds
Registered trials
Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.