Evidence map›Paper›PMID 38434070›Full record

ArticleHeliyon2024

New avenues for residual stress analysis in ultrathin atomic layer deposited free-standing membranes through release of micro-cantilevers.

S Burgmann, M J Lid, H J D Johnsen, N P Vedvik, B Haugen, J Provine, A T J van Helvoort, J Torgersen

Abstract read
PubMed Full text at PMC Publisher
In one paragraph

Article in Heliyon, 2024. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 1 paper.

0numbers the graph read from it
0cells of the map it votes in
1citing papers in PubMed
–field-weighted citation impact
1 · What the graph read from it

What it found

Each row is one number read from the abstract, on the scale the paper reported it, with its interval. Left of the dashed line favours the treatment, right favours the comparator. Under each row is the sentence it came from. New to these charts? A ten-minute tutorial.

The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.

2 · The registry

The trial behind it

Trials whose registry record cites this paper, or whose number appears in the abstract. A trial that started after this paper was published is citing it as background, not reporting it.

Neither the registry nor the abstract names a trial number. If this is a trial report, that itself is worth knowing.

3 · Its place in the literature

Who cites it

1 citing paper in PubMed.

  1. Article
4 · The record

Corrections and comments

PubMed lists nothing against this paper. Absence here is not a guarantee, only a check that was made.

5 · Who and what money

Authors and funding

8 authors.

S BurgmannDepartment of Mechanical and Industrial Engineering, NTNU, Trondheim, Norwegian University of Science and Technology, Norway.
M J LidDepartment of Mechanical and Industrial Engineering, NTNU, Trondheim, Norwegian University of Science and Technology, Norway.
H J D JohnsenDepartment of Mechanical and Industrial Engineering, NTNU, Trondheim, Norwegian University of Science and Technology, Norway.
N P VedvikDepartment of Mechanical and Industrial Engineering, NTNU, Trondheim, Norwegian University of Science and Technology, Norway.
B HaugenDepartment of Mechanical and Industrial Engineering, NTNU, Trondheim, Norwegian University of Science and Technology, Norway.
J ProvineAligned Carbon, Santa Clara, CA, USA.
A T J van HelvoortDepartment of Physics, NTNU, Trondheim, Norwegian University of Science and Technology, Norway.
J TorgersenChair of Materials Science, Department of Materials Engineering, TUM School of Engineering and Design, Technical University of Munich, Germany.

Funding

No grant is acknowledged in the PubMed record.

6 · The paper itself

Abstract

The fabrication of thinnest, yet undeformed membrane structures with nanometer resolution is a prerequisite for a variety of Microelectromechanical systems (MEMS). However, functionally relevant thin films are susceptible to growth-generated stress. To tune the performance and reach large aspect ratios, knowledge of the intrinsic material properties is indispensable. Here, we present a new method for stress evaluation through releasing defined micro-cantilever segments by focused ion beam (FIB) milling from a predefined free-standing membrane structure. Thereby, the cantilever segment is allowed to equilibrate to a stress-released state through measurable strain in the form of a resulting radius of curvature. This radius can be back-calculated to the residual stress state. The method was tested on a 20 nm and 50 nm thick tunnel-like ALD Image 1 membrane structure, revealing a significant amount of residual stress with 866 MPa and 6104 MPa, respectively. Complementary finite element analysis to estimate the stress distribution in the structure showed a 97% and 90% agreement in out-of-plane deflection for the 20 nm and 50 nm membranes, respectively. This work reveals the possibilities of releasing entire membrane segments from thin film membranes with a significant amount of residual stress and to use the resulting bending behavior for evaluating stress and strain by measuring their deformation.

Indexed as

ALDFIBResidual stressStrain analysisUltrathin membranes

Identifiers

PMID38434070
PMCPMC10906182

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Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.