Evidence map›Paper›PMID 38398964›Full record

ArticleMicromachines2024

Water-Immersible MEMS Mirror with a Large Optical Aperture.

Yi Yang, Yichen Liu, Yongquan Su, Yang Wang, Yonggui Zhang, Hao Chen, Lihao Wang, Zhenyu Wu

Open access · goldAbstract read
PubMed Full text at PMC Publisher
In one paragraph

Article in Micromachines, 2024. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 1 paper.

0numbers the graph read from it
0cells of the map it votes in
1citing papers in PubMed
1.3field-weighted citation impact, top 23% of its field
1 · What the graph read from it

What it found

Each row is one number read from the abstract, on the scale the paper reported it, with its interval. Left of the dashed line favours the treatment, right favours the comparator. Under each row is the sentence it came from. New to these charts? A ten-minute tutorial.

The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.

2 · The registry

The trial behind it

Trials whose registry record cites this paper, or whose number appears in the abstract. A trial that started after this paper was published is citing it as background, not reporting it.

Neither the registry nor the abstract names a trial number. If this is a trial report, that itself is worth knowing.

3 · Its place in the literature

Who cites it

1 citing paper in PubMed, 7 citations in OpenAlex.

  1. Review
4 · The record

Corrections and comments

PubMed lists nothing against this paper. Absence here is not a guarantee, only a check that was made.

5 · Who and what money

Authors and funding

8 authors at 2 institutions in 1 country.

Yi YangSchool of Microelectronics, Shanghai University, Shanghai 200444, China.
Yichen LiuState Key Laboratory of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China.ORCID 0000-0002-6681-5582
Yongquan SuSchool of Microelectronics, Shanghai University, Shanghai 200444, China.
Yang WangState Key Laboratory of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China.ORCID 0000-0002-0688-0550
Yonggui ZhangState Key Laboratory of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China.
Hao ChenState Key Laboratory of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China.
Lihao WangState Key Laboratory of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China.
Zhenyu WuSchool of Microelectronics, Shanghai University, Shanghai 200444, China.ORCID 0000-0002-0025-3521
Chinese Academy of Sciences · CNShanghai University · CN

Funding

National Key R&D Program of China； Shanghai Municipal Science and Technology Commission；Science and Technology Innovation Action Plan" Daystar Project No.2021YFB3202500； HCXBCY-2021-044； 23YF1445100
6 · The paper itself

Abstract

This paper presents a two-axis AlScN-based water-immersible MEMS mirror fabricated in an 8-inch MEMS process. Compared with other studies, this device has a larger optical aperture 10 mm in diameter. The resonant frequencies of the device are 1011 Hz in air and 342 Hz in water. The scanning angle reaches ±5° and ±2° at resonant frequencies in air and water, respectively. The cavitation phenomenon is observed when the device is operating in water, which leads the device to electrical failure. To address this issue, a device with reduced resonant frequencies-246 Hz and 152 Hz in air and water-is characterized, through which the bubbles can be effectively prohibited. This MEMS mirror could potentially be used in ultrasound and photoacoustic microscopy applications.

Indexed as

AlScNcavitationMEMS mirrorpiezoelectricwater immersible

Identifiers

PMID38398964
PMCPMC10892426
OpenAlexW4391471741

What OpenQuestion holds

Textmetadata
LicenceCC BY
Read underepoch 390

Registered trials

None linked

Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.