ArticleMicromachines2024
Characterization of Sensitivity of Time Domain MEMS Accelerometer.
Article in Micromachines, 2024. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 2 papers.
What it found
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The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.
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Who cites it
2 citing papers in PubMed.
- Resonant Drive Techniques for Electrostatic Microelectromechanical Systems (MEMS): A Comparative Study.Sensors (Basel, Switzerland) · 2025Article
- Top-Down Design Method of a Time Domain Accelerometer with Adjustable Resolution.Micromachines · 2024Article
Corrections and comments
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Authors and funding
6 authors.
Funding
Abstract
This paper characterizes the sensitivity of a time domain MEMS accelerometer. The sensitivity is defined by the increment in the measured time interval per gravitational acceleration. Two sensitivities exist, and they can be enhanced by decreasing the amplitude and frequency. The sensitivity with minor nonlinearity is chosen to evaluate the time domain sensor. The experimental results of the developed accelerometer demonstrate that the sensitivities span from -68.91 μs/g to -124.96 μs/g and the 1σ noises span from 8.59 mg to 6.2 mg (amplitude of 626 nm: -68.91 μs/g and 10.21 mg; amplitude of 455 nm: -94.51 μs/g and 7.76 mg; amplitude of 342 nm: -124.96 μs/g and 6.23 mg), which indicates the bigger the amplitude, the smaller the sensitivity and the bigger the 1σ noise. The adjustable sensitivity provides a theoretical foundation for range self-adaption, and all the results can be extended to other time domain inertial sensors, e.g., a gyroscope or an inclinometer.
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Registered trials
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