ArticleMicrosystems & nanoengineering2024
Highly-sensitive wafer-scale transfer-free graphene MEMS condenser microphones.
Article in Microsystems & nanoengineering, 2024. The graph could read no effect estimate from its abstract, so it casts no vote on the map. An erratum has been issued. Cited by 7 papers.
What it found
Each row is one number read from the abstract, on the scale the paper reported it, with its interval. Left of the dashed line favours the treatment, right favours the comparator. Under each row is the sentence it came from. New to these charts? A ten-minute tutorial.
The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.
The trial behind it
Trials whose registry record cites this paper, or whose number appears in the abstract. A trial that started after this paper was published is citing it as background, not reporting it.
Neither the registry nor the abstract names a trial number. If this is a trial report, that itself is worth knowing.
Who cites it
7 citing papers in PubMed, 14 citations in OpenAlex.
- High sensitivity acoustic flow sensing based on bio-inspired web-like structure for panoramic acoustic perception.Microsystems & nanoengineering · 2025Article
- Suspended graphene-based NEMS accelerometers with direct electrical readout.Microsystems & nanoengineering · 2025Article
- Editorial for the Special Issue on Micromachined Acoustic Transducers for Audio-Frequency Range.Micromachines · 2025Article
- The Graphene Squeeze-Film Microphone.Nano letters · 2024Article
- Graphene MEMS and NEMS.Microsystems & nanoengineering · 2024Review
- Acoustically semitransparent nanofibrous meshes appraised by high signal-to-noise-ratio MEMS microphones.Communications engineering · 2024Article
- Correction: Highly-sensitive wafer-scale transfer-free graphene MEMS condenser microphones.Microsystems & nanoengineering · 2024Article
Corrections and comments
- Erratum issued
Authors and funding
7 authors at 2 institutions in 2 countries.
Funding
No grant is acknowledged in the PubMed record.
Abstract
Since the performance of micro-electro-mechanical system (MEMS)-based microphones is approaching fundamental physical, design, and material limits, it has become challenging to improve them. Several works have demonstrated graphene's suitability as a microphone diaphragm. The potential for achieving smaller, more sensitive, and scalable on-chip MEMS microphones is yet to be determined. To address large graphene sizes, graphene-polymer heterostructures have been proposed, but they compromise performance due to added polymer mass and stiffness. This work demonstrates the first wafer-scale integrated MEMS condenser microphones with diameters of 2
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What OpenQuestion holds
Registered trials
Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.