Development of a Large-Range XY-Compliant Micropositioning Stage with Laser-Based Sensing and Active Disturbance Rejection Control.

Ashenafi Abrham Kassa, Bijan Shirinzadeh, Kim Sang Tran, Kai Zhong Lai, Yanling Tian, Yanding Qin, Huaxian Wei

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Article in Sensors (Basel, Switzerland), 2024. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Not yet cited in PubMed.

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7 authors.

Ashenafi Abrham KassaRobotics and Mechatronics Research Laboratory (RMRL), Department of Mechanical and Aerospace Engineering, Monash University, Melbourne, VIC 3800, Australia.

Bijan ShirinzadehRobotics and Mechatronics Research Laboratory (RMRL), Department of Mechanical and Aerospace Engineering, Monash University, Melbourne, VIC 3800, Australia.

Kim Sang TranRobotics and Mechatronics Research Laboratory (RMRL), Department of Mechanical and Aerospace Engineering, Monash University, Melbourne, VIC 3800, Australia.ORCID 0009-0007-8756-2266

Kai Zhong LaiRobotics and Mechatronics Research Laboratory (RMRL), Department of Mechanical and Aerospace Engineering, Monash University, Melbourne, VIC 3800, Australia.

Yanling TianSchool of Engineering, University of Warwick, Coventry CV4 7AL, UK.

Yanding QinCollege of Artificial Intelligence, Nankai University, Tianjin 300350, China.ORCID 0000-0001-5162-1665

Huaxian WeiDepartment of Mechanical Engineering, College of Engineering, Shantou University, Shantou 515063, China.

Funding

No grant is acknowledged in the PubMed record.

6 · The paper itself

Abstract

This paper presents a novel design and control strategies for a parallel two degrees-of-freedom (DOF) flexure-based micropositioning stage for large-range manipulation applications. The motion-guiding beam utilizes a compound hybrid compliant prismatic joint (CHCPJ) composed of corrugated and leaf flexures, ensuring increased compliance in primary directions and optimal stress distribution with minimal longitudinal length. Additionally, a four-beam parallelogram compliant prismatic joint (4BPCPJ) is used to improve the motion decoupling performance by increasing the off-axis to primary stiffness ratio. The mechanism's output compliance and dynamic characteristics are analyzed using the compliance matrix method and Lagrange approach, respectively. The accuracy of the analysis is verified through finite element analysis (FEA) simulation. In order to examine the mechanism performance, a laser interferometer-based experimental setup is established. In addition, a linear active disturbance rejection control (LADRC) is developed to enhance the motion quality. Experimental results illustrate that the mechanism has the capability to provide a range of 2.5 mm and a resolution of 0.4 μm in both the X and Y axes. Furthermore, the developed stage has improved trajectory tracking and disturbance rejection capabilities.

Indexed as

active disturbance rejection controlcompliant mechanismlaser interferometer-based measurementmicropositioning stage

Identifiers

PMID38276356

DOI10.3390/s24020663

PMCPMC10820067

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