Evidence map›Paper›PMID 38258213›Full record

ArticleMicromachines2023

Inert-Atmosphere Microfabrication Technology for 2D Materials and Heterostructures.

Aliaksandr Duleba, Mikhail Pugachev, Mark Blumenau, Sergey Martanov, Mark Naumov, Aleksey Shupletsov, Aleksandr Kuntsevich

Open access · goldAbstract read
In one paragraph

Article in Micromachines, 2023. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 1 paper.

0numbers the graph read from it
0cells of the map it votes in
1citing papers in PubMed
0.2field-weighted citation impact, top 57% of its field
1 · What the graph read from it

What it found

Each row is one number read from the abstract, on the scale the paper reported it, with its interval. Left of the dashed line favours the treatment, right favours the comparator. Under each row is the sentence it came from. New to these charts? A ten-minute tutorial.

The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.

2 · The registry

The trial behind it

Trials whose registry record cites this paper, or whose number appears in the abstract. A trial that started after this paper was published is citing it as background, not reporting it.

Neither the registry nor the abstract names a trial number. If this is a trial report, that itself is worth knowing.

3 · Its place in the literature

Who cites it

1 citing paper in PubMed, 2 citations in OpenAlex.

  1. Article
4 · The record

Corrections and comments

PubMed lists nothing against this paper. Absence here is not a guarantee, only a check that was made.

5 · Who and what money

Authors and funding

7 authors at 2 institutions in 1 country.

Aliaksandr DulebaP.N. Lebedev Physical Institute of the Russian Academy of Sciences, Moscow 119991, Russia.ORCID 0000-0003-1633-2029
Mikhail PugachevP.N. Lebedev Physical Institute of the Russian Academy of Sciences, Moscow 119991, Russia.
Mark BlumenauP.N. Lebedev Physical Institute of the Russian Academy of Sciences, Moscow 119991, Russia.ORCID 0009-0001-9585-8565
Sergey MartanovP.N. Lebedev Physical Institute of the Russian Academy of Sciences, Moscow 119991, Russia.ORCID 0000-0001-7275-4686
Mark NaumovDukhov Research Institute of Automatics (VNIIA), Moscow 127055, Russia.ORCID 0000-0002-5747-515X
Aleksey ShupletsovP.N. Lebedev Physical Institute of the Russian Academy of Sciences, Moscow 119991, Russia.ORCID 0000-0002-0813-9467
Aleksandr KuntsevichP.N. Lebedev Physical Institute of the Russian Academy of Sciences, Moscow 119991, Russia.ORCID 0000-0003-0302-2320
P.N. Lebedev Physical Institute of the Russian Academy of Sciences · RUAll Russia Research Institute of Automatics · RU

Funding

The Ministry of Education and Science of the Russian Federation 075-15-2021-598
6 · The paper itself

Abstract

Most 2D materials are unstable under ambient conditions. Assembly of van der Waals heterostructures in the inert atmosphere of the glove box with ex situ lithography partially solves the problem of device fabrication out of unstable materials. In our paper, we demonstrate an approach to the next-generation inert-atmosphere (nitrogen, <20 ppm oxygen content) fabrication setup, including optical contact mask lithography with a 2 μm resolution, metal evaporation, lift-off and placement of the sample to the cryostat for electric measurements in the same inert atmosphere environment. We consider basic construction principles, budget considerations, and showcase the fabrication and subsequent degradation of black-phosphorous-based structures within weeks. The proposed solutions are surprisingly compact and inexpensive, making them feasible for implementation in numerous 2D materials laboratories.

Indexed as

2D materialslithographymetal filmsnanofabricationvan der Waals heterostructures

Identifiers

PMID38258213
PMCPMC11154319
OpenAlexW4390471284

What OpenQuestion holds

Textmetadata
LicenceCC BY
Read underepoch 390

Registered trials

None linked

Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.