Evidence map›Paper›PMID 38258191›Full record

ArticleMicromachines2023

Stepped-Tube Backside Cavity Piezoelectric Ultrasound Transducer Based on Sc

Xiaobao Li, Haochen Lyu, Ahmad Safari, Songsong Zhang

Abstract read
In one paragraph

Article in Micromachines, 2023. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 2 papers.

0numbers the graph read from it
0cells of the map it votes in
2citing papers in PubMed
–field-weighted citation impact
1 · What the graph read from it

What it found

Each row is one number read from the abstract, on the scale the paper reported it, with its interval. Left of the dashed line favours the treatment, right favours the comparator. Under each row is the sentence it came from. New to these charts? A ten-minute tutorial.

The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.

2 · The registry

The trial behind it

Trials whose registry record cites this paper, or whose number appears in the abstract. A trial that started after this paper was published is citing it as background, not reporting it.

Neither the registry nor the abstract names a trial number. If this is a trial report, that itself is worth knowing.

3 · Its place in the literature

Who cites it

2 citing papers in PubMed.

  1. Article
  2. Article
4 · The record

Corrections and comments

PubMed lists nothing against this paper. Absence here is not a guarantee, only a check that was made.

5 · Who and what money

Authors and funding

4 authors.

Xiaobao LiSchool of Microelectronics, Shanghai University, Shanghai 200444, China.
Haochen LyuShanghai Melon Technology Company Ltd., Shanghai 201899, China.
Ahmad SafariDepartment of Materials Science and Engineering, Rutgers, The State University of New Jersey, Piscataway, NJ 08854, USA.
Songsong ZhangSchool of Microelectronics, Shanghai University, Shanghai 200444, China.ORCID 0000-0001-5598-7891

Funding

No grant is acknowledged in the PubMed record.

6 · The paper itself

Abstract

This paper presents a novel piezoelectric micromachined ultrasonic transducer (PMUT) with theoretical simulation, fabrication, and testing. Conventional methods using a PCB or an external horn to adjust the PMUT acoustic field angle are limited by the need for transducer size. To address this limitation, the stepped-tube (expanded tube) backside cavity PMUT has been proposed. The stepped-tube PMUT and the tube PMUT devices have the same membrane structure, and the acoustic impedance matching of the PMUT is optimized by modifying the boundary conditions of the back cavity structure. The acoustic comparison experiments show that the average output sound pressure of the stepped-tube backside cavity PMUT has increased by 17%, the half-power-beam-width (θ

Indexed as

acoustic fielddirectivityPMUTscandium-doped aluminum nitride (Sc0.2AI0.8N)

Identifiers

PMID38258191
PMCPMC10819439

What OpenQuestion holds

Textmetadata
LicenceCC BY
Read underepoch 390

Registered trials

None linked

Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.