ArticleMicromachines2023
Multi-Material Radial Phononic Crystals to Improve the Quality Factor of Piezoelectric MEMS Resonators.
Article in Micromachines, 2023. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Not yet cited in PubMed.
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Abstract
In this paper, a multi-material radial phononic crystal (M-RPC) structure is proposed to reduce the anchor-point loss of piezoelectric micro-electro-mechanical system (MEMS) resonators and improve their quality factor. Compared with single-material phononic crystal structures, an M-RPC structure can reduce the strength damage at the anchor point of a resonator due to the etching of the substrate. The dispersion curve and frequency transmission response of the M-RPC structure were calculated by applying the finite element method, and it was shown that the M-RPC structure was more likely to produce a band-gap range with strong attenuation compared with a single-material radial phononic crystal (S-RPC) structure. Then, the effects of different metal-silicon combinations on the band gap of the M-RPC structures were studied, and we found that the largest band-gap range was produced by a Pt and Si combination, and the range was 84.1-118.3 MHz. Finally, the M-RPC structure was applied to a piezoelectric MEMS resonator. The results showed that the anchor quality factor of the M-RPC resonator was increased by 33.5 times compared with a conventional resonator, and the insertion loss was reduced by 53.6%. In addition, the loaded and unloaded quality factors of the M-RPC resonator were improved by 75.7% and 235.0%, respectively, and at the same time, there was no effect on the electromechanical coupling coefficient.
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