Dielectrophoretically Assembled SWCNTs Networks on SU-8 Substrate for PEG/SWCNTs Composite Gas Sensor.

Jin-Chern Chiou, Chin-Cheng Wu, Tse-Mei Lin, Yu-Chieh Huang

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Article in Polymers, 2023. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Not yet cited in PubMed.

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5 · Who and what money

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4 authors.

Jin-Chern ChiouDepartment of Electronics and Electrical Engineering, National Yang Ming Chiao Tung University, 1001 University Road, Hsinchu City 30010, Taiwan.

Chin-Cheng WuDepartment of Electronics and Electrical Engineering, National Yang Ming Chiao Tung University, 1001 University Road, Hsinchu City 30010, Taiwan.

Tse-Mei LinDepartment of Electronics and Electrical Engineering, National Yang Ming Chiao Tung University, 1001 University Road, Hsinchu City 30010, Taiwan.

Yu-Chieh HuangInstitute of Electrical and Control Engineering, National Yang Ming Chiao Tung University, 1001 University Road, Hsinchu City 30010, Taiwan.ORCID 0000-0002-8711-0821

Funding

National Science and Technology Conuncil, R.O.C. NSTC 112-2321-B-037-006

6 · The paper itself

Abstract

This study proposed a SU-8 based gas sensor, integrated with heater and sensing electrodes, to develop a multi-channel gas sensor with PEG/SWCNTs composite films. The impedance of single-walled carbon nanotubes (SWCNTs) on each sensing electrode was well controlled via dielectrophoresis technology. To investigate dielectrophoretic mobility characteristics, the concentric circular sensing electrode has three different spacing between the inner and outer electrodes, including 10 μm, 15 μm, and 20 μm. The electrodes were applied with a 5 MHz AC source with a voltage ranging from 1 Vpp to 5 Vpp. Polyethylene glycol (PEG) was deposited on the gas sensor via drop casting. The fabricated gas sensor was operated at different working temperatures, including 25 °C, 40 °C, 50 °C and 60 °C, to examine the sensing response. The response results revealed that the PEG/SWCNTs composites gas sensor with 60 °C working temperature exhibited the ability to detect 80 ppm ethanol vapor.

Indexed as

dielectrophoresisgas sensorpolyethylene glycolsingle-walled carbon nanotubesSU-8

Identifiers

PMID38201739

DOI10.3390/polym16010074

PMCPMC10780828

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