ArticleSensors (Basel, Switzerland)2023
A Grating Interferometric Acoustic Sensor Based on a Flexible Polymer Diaphragm.
Article in Sensors (Basel, Switzerland), 2023. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Not yet cited in PubMed.
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Abstract
This study presents a grating interferometric acoustic sensor based on a flexible polymer diaphragm. A flexible-diaphragm acoustic sensor based on grating interferometry (GI) is proposed through design, fabrication and experimental demonstration. A gold-coated polyethylene terephthalate diaphragm was used for the sensor prototype. The vibration of the diaphragm induces a change in GI cavity length, which is converted into an electrical signal by the photodetector. The experimental results show that the sensor prototype has a flat frequency response in the voice frequency band and the minimum detectable sound pressure can reach 164.8 µPa/√Hz. The sensor prototype has potential applications in speech acquisition and the measurement of water content in oil. This study provides a reference for the design of optical interferometric acoustic sensor with high performance.
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