ArticleSensors (Basel, Switzerland)2023
Interactive Errors Analysis and Scale Factor Nonlinearity Reduction Methods for Lissajous Frequency Modulated MEMS Gyroscope.
Article in Sensors (Basel, Switzerland), 2023. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 2 papers.
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The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.
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Who cites it
2 citing papers in PubMed.
- The In-Plane Deformation and Free Vibration Analysis of a Rotating Ring Resonator of a Gyroscope with Evenly Distributed Mass Imperfections.Sensors (Basel, Switzerland) · 2025Article
- Design and Modelling of MEMS Vibrating Internal Ring Gyroscopes for Harsh Environments.Sensors (Basel, Switzerland) · 2024Article
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Authors and funding
8 authors.
Funding
Abstract
Although the Lissajous frequency modulated (LFM) mode can improve the long-term and temperature stability of the scale factor (SF) for mode mismatch MEMS gyroscopes, its SF nonlinearity poses a significant limitation for full-scale accuracy maintenance. This paper examines the interaction effects among stiffness coupling, system phase delay, readout demodulation phase shift, and velocity amplitude mismatch within the control process. Based on the completion of frequency difference control and demodulation phase matching, we clarify that the remaining stiffness coupling and residual system phase error are the primary factors influencing SF nonlinearity. Furthermore, SF nonlinearity is reduced through error compensation. On one hand, this paper suppresses stiffness coupling through the observation of the instantaneous frequency difference and the application of the quadrature voltage. On the other hand, system phase error is compensated by observing the amplitude control force and tuning the reference in the Phase-Locked Loops (PLLs). Subsequent simulations of these methods demonstrated a remarkable 97% reduction in SF nonlinearity within the measurement range of ±500°/s. In addition, an observed rule dictates that maintaining a sufficiently large frequency split effectively constrains the SF nonlinearity.
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