Evidence map›Paper›PMID 38138833›Full record

ArticleMaterials (Basel, Switzerland)2023

Single-Ion Counting with an Ultra-Thin-Membrane Silicon Carbide Sensor.

Enrico Sangregorio, Lucia Calcagno, Elisabetta Medina, Andreo Crnjac, Milko Jakšic, Anna Vignati, Francesco Romano, Giuliana Milluzzo, Marzio De Napoli, Massimo Camarda

Abstract read
In one paragraph

Article in Materials (Basel, Switzerland), 2023. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 2 papers.

0numbers the graph read from it
0cells of the map it votes in
2citing papers in PubMed
–field-weighted citation impact
1 · What the graph read from it

What it found

Each row is one number read from the abstract, on the scale the paper reported it, with its interval. Left of the dashed line favours the treatment, right favours the comparator. Under each row is the sentence it came from. New to these charts? A ten-minute tutorial.

The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.

2 · The registry

The trial behind it

Trials whose registry record cites this paper, or whose number appears in the abstract. A trial that started after this paper was published is citing it as background, not reporting it.

Neither the registry nor the abstract names a trial number. If this is a trial report, that itself is worth knowing.

3 · Its place in the literature

Who cites it

2 citing papers in PubMed.

  1. Article
  2. Article
4 · The record

Corrections and comments

PubMed lists nothing against this paper. Absence here is not a guarantee, only a check that was made.

5 · Who and what money

Authors and funding

10 authors.

Enrico SangregorioDepartment of Physics and Astronomy "Ettore Majorana", University of Catania (Italy), Via Santa Sofia 64, 95123 Catania, Italy.ORCID 0000-0003-0044-5889
Lucia CalcagnoDepartment of Physics and Astronomy "Ettore Majorana", University of Catania (Italy), Via Santa Sofia 64, 95123 Catania, Italy.
Elisabetta MedinaSTLab srl, Via Anapo 53, 95126 Catania, Italy.ORCID 0000-0003-3127-8577
Andreo CrnjacDivision of Experimental Physics, Ruđer Bošković Institute, 10000 Zagreb, Croatia.ORCID 0000-0003-1689-5091
Milko JakšicDivision of Experimental Physics, Ruđer Bošković Institute, 10000 Zagreb, Croatia.ORCID 0000-0002-6750-9990
Anna VignatiPhysics Department, Università degli Studi di Torino, Via Pietro Giuria 1, 10125 Turin, Italy.
Francesco RomanoINFN-National Institute for Nuclear Physics, Catania Division, Via S. Sofia 64, 95123 Catania, Italy.
Giuliana MilluzzoINFN-National Institute for Nuclear Physics, Catania Division, Via S. Sofia 64, 95123 Catania, Italy.
Marzio De NapoliINFN-National Institute for Nuclear Physics, Catania Division, Via S. Sofia 64, 95123 Catania, Italy.ORCID 0000-0003-0207-8648
Massimo CamardaSTLab srl, Via Anapo 53, 95126 Catania, Italy.ORCID 0000-0003-2797-8802

Funding

No grant is acknowledged in the PubMed record.

6 · The paper itself

Abstract

In recent times, ion implantation has received increasing interest for novel applications related to deterministic material doping on the nanoscale, primarily for the fabrication of solid-state quantum devices. For such applications, precise information concerning the number of implanted ions and their final position within the implanted sample is crucial. In this work, we present an innovative method for the detection of single ions of MeV energy by using a sub-micrometer ultra-thin silicon carbide sensor operated as an in-beam counter of transmitted ions. The SiC sensor signals, when compared to a Passivated Implanted Planar Silicon detector signal, exhibited a 96.5% ion-detection confidence, demonstrating that the membrane sensors can be utilized for high-fidelity ion counting. Furthermore, we assessed the angular straggling of transmitted ions due to the interaction with the SiC sensor, employing the scanning knife-edge method of a focused ion microbeam. The lateral dimension of the ion beam with and without the membrane sensor was compared to the SRIM calculations. The results were used to discuss the potential of such experimental geometry in deterministic ion-implantation schemes as well as other applications.

Indexed as

counting efficiencydeterministic ion implantationmembrane sensorsilicon carbidespatial resolution

Identifiers

PMID38138833
PMCPMC10744360

What OpenQuestion holds

Textmetadata
LicenceCC BY
Read underepoch 390

Registered trials

None linked

Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.