Quality Factor Improvement of a Thin-Film Piezoelectric-on-Silicon Resonator Using a Radial Alternating Material Phononic Crystal.

Chuang Zhu, Muxiang Su, Temesgen Bailie Workie, Panliang Tang, Changyu Ye, Jing-Fu Bao

Abstract read

In one paragraph

Article in Micromachines, 2023. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Not yet cited in PubMed.

0numbers the graph read from it

0cells of the map it votes in

0citing papers in PubMed

–field-weighted citation impact

1 · What the graph read from it

What it found

Each row is one number read from the abstract, on the scale the paper reported it, with its interval. Left of the dashed line favours the treatment, right favours the comparator. Under each row is the sentence it came from. New to these charts? A ten-minute tutorial.

The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.

2 · The registry

The trial behind it

Trials whose registry record cites this paper, or whose number appears in the abstract. A trial that started after this paper was published is citing it as background, not reporting it.

Neither the registry nor the abstract names a trial number. If this is a trial report, that itself is worth knowing.

3 · Its place in the literature

Who cites it

0 citing papers in PubMed.

No citing paper in PubMed yet.

4 · The record

Corrections and comments

PubMed lists nothing against this paper. Absence here is not a guarantee, only a check that was made.

5 · Who and what money

Authors and funding

6 authors.

Chuang ZhuSchool of Integrated Circuit Science and Engineering, University of Electronic Science and Technology of China, Chengdu 611731, China.

Muxiang SuSchool of Integrated Circuit Science and Engineering, University of Electronic Science and Technology of China, Chengdu 611731, China.

Temesgen Bailie WorkieSchool of Integrated Circuit Science and Engineering, University of Electronic Science and Technology of China, Chengdu 611731, China.ORCID 0000-0003-2093-5877

Panliang TangSchool of Integrated Circuit Science and Engineering, University of Electronic Science and Technology of China, Chengdu 611731, China.

Changyu YeSchool of Integrated Circuit Science and Engineering, University of Electronic Science and Technology of China, Chengdu 611731, China.

Jing-Fu BaoSchool of Integrated Circuit Science and Engineering, University of Electronic Science and Technology of China, Chengdu 611731, China.ORCID 0000-0002-8752-5234

Funding

Jing-Fu Bao A1098531023601318Jing-Fu Bao U1430102

6 · The paper itself

Abstract

This paper studies the radial alternating material phononic crystal (RAM-PnC). By simulating the band gap structure of the phononic crystal, a complete acoustic band gap was verified at the resonant frequency of 175.14 MHz, which can prevent the propagation of elastic waves in a specific direction. The proposed alternately arranged radial phononic crystal structure is applied to the thin-film piezoelectric-on-silicon (TPOS) MEMS resonator. The finite element simulation method increases the anchor quality factor (

Indexed as

anchor lossRAM-PnCresonator

Identifiers

PMID38138410

DOI10.3390/mi14122241

PMCPMC10745300

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Registered trials

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Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.